【作者】 王伟； 付志强； 王成彪；

【Author】 WANG Wei;FU Zhi-qiang;WANG Cheng-biao;School of Engineering and Technology,China University of Geosciences;

【机构】 中国地质大学(北京)工程技术学院；

【摘要】 采用真空阴极电弧沉积过渡层,直流磁控溅射结合离子源的方法,在硅片(100)和不锈钢(9Cr18)基体上制备了Cr/CrN/CrNC/CrC/W-DLC的梯度复合膜。利用拉曼能谱(Raman)、X射线光电子能谱(XPS)、纳米硬度计、划痕仪及摩擦磨损试验机等手段分析了膜层的键结构、化学成分及结合状态、硬度及弹性模量、膜/基结合力及摩擦磨损性能。结果表明:采用该技术制备得到的梯度复合膜具有良好的膜/基结合性能(临界载荷大于70N),薄膜钨含量随溅射电流的增大而提高,H/E为0.09,摩擦系数在0.15—0.22范围内变化,在钨含量为10.73%时,薄膜的磨损率最小为80.26(mm3/min)×10-7。更多还原

【Abstract】 A series of gradient films of Cr/CrN/CrNC/CrC/(W-DLC) were deposited on Si(100) wafer and 9Cr18 stainless steel by dc magnetron sputtering(DC-MS) method combined with ion beam sputter(IBS).Raman spectroscope,X-ray photoelectron spectroscopy,scanning electron microscopy,nano-indentation,scratch adhesion tester and friction-wear tester have been used to investigate the bond structure,chemical composite,hardness and modulus,critical load and wear performance of the films.The results indicate that the W-doped DLC films synthesized by a hybrid of DC-MS and IBS showed better adhesion to the substrates(critical load is higher than 70N) and W content of the films increased with the sputtering target current.The H/E ratio of the films was about 0.09.The friction coefficient ranged from 0.15 to 0.22,and the lowest wearrate of films was 80.26(mm3/min)×10-7 when w content reached 10.73%.更多还原