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类金刚石涂层微型钻头的制备研究

Study on Preparation of Diamond-like Carbon Coating Micro-drill

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【作者】 李远汪建华谢鹏熊礼威刘长林

【Author】 LI Yuan,WANG Jianhua,XIE Peng,XIONG Liwei,LIU Changlin (Key Laboratory of Plasma Chemistry & Advanced Materials,School of Materials and Engineering, Wuhan Institute of Techology,Wuhan 430073)

【机构】 武汉工程大学材料与工程学院湖北省等离子体化学与新材料重点实验室

【摘要】 通过在微型硬质合金钻头上分别施加W、WC、Ti和TiN等4种单层过渡层,在自制射频辉光等离子体装置上沉积了类金刚石(DLC)涂层。运用激光拉曼光谱仪和扫描电子显微镜对各道工序前后钻头的表面形貌和类金刚石涂层的质量进行了表征,同时在玻璃材料上进行了手动钻孔测试。实验结果表明,镀有Ti过渡层的钻头在玻璃板上钻13个孔后才出现膜剥落的情况,说明施加Ti过渡层能更好地提高DLC膜与基底之间的附着力,从而延长钻头的使用寿命。

【Abstract】 Diamond-like carbon coating is prepared on the drill bits in the home-made radio frequency glow plasma device after the process of experiment that W.WC,Ti and TiN imposed on the micro-carbide drill bits as four single -layer transition respectively.The surface morphology of the drill bits and quality of diamond-like carbon coatings that before and after the procedures,is examined by laser raman spectroscopy and scanning electron microscope.The cutting performance of diamond-like carbon coated drill is studied by drilling glass.The results show that the Ti transition layers desquamated after even 13 holes drilled on glass.This shows that the imposition of the Ti transition layer is better to improve the adhesion between DLC film and the substrate and thus to extend the service life of drill bits.

【基金】 国家自然科学基金(650572075)
  • 【会议录名称】 “第十四届全国微波能应用学术会议”暨“2009年微波创造美的生活高峰论坛”论文集
  • 【会议名称】“第十四届全国微波能应用学术会议”暨“2009年微波创造美的生活高峰论坛”
  • 【会议时间】2009-11-18
  • 【会议地点】中国广东佛山
  • 【分类号】TG713.1
  • 【主办单位】中国电子学会微波分会
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