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多皱纹纳米石墨片的制备及其工艺研究
Synthesis of Wrinkles-Rich Carbon Nano Sheet
【Author】 Liu Weihua,Dang Tao,Zhu Changchun (School of Electronic and Information Engineering,Xi an Jiaotong University,Xi’an 710049,China)
【机构】 西安交通大学电子与信息工程学院;
【摘要】 在500℃下,采用PECVD法在以玻璃为衬底的多种金属镀层上成功制备出纳米石墨片。SEM分析表明,不同催化剂层上生长的二维纳米石墨片在形态上存在显著区别。在所涉及的工艺参数范围内,Ni/Zn复合金属镀层上二维纳米石墨片的生长效率最高,且在部分区域具有碳纳米墙形貌特征。TEM分析表明,所生长的二维纳米石墨片具有大量皱纹,且皱纹具有指纹形的石墨层状结构。纳米尺度的皱纹随机分布于整个二维纳米石墨片中,与超薄石墨烯自然形成的皱褶存在显著区别。根据指纹形皱纹的最大层数估计,石墨片的厚度在10 nm左右,这种多皱纹纳米石墨片反映了催化剂对二维石墨生长的影响。这种材料除了可作为场发射冷阴极外,在催化剂载体以及气敏传感器等领域都可能有重要应用。
【Abstract】 Carbon nano sheet were synthesized on catalyst coated glass by PECVD method at 500℃,The morphology of 2-D carbon nanostructures are quite different on different catalyst, and the growth ratio of carbon nano sheet on the Ni/Zn complex catalyst layer are significantly high than Ni and Ni/Co catalyst in the process condition.Carbon nano sheet in the form of nanowall are observed on the Ni/Zn coated samples.TEM analysis revealed the carbon nano sheets growing on the Ni/Zn coated samples are wrinkles-rich in internal structures.Layered structure of graphene are observed in the wrinkles,which is significant different from the folds or corrugates of ultra-thin graphene.The wrinkles of nanometer size randomly distributes in the whole carbon nano sheet.About 10 nm thickness of the nano sheets is estimated by the number of layers.Wrinkles-rich carbon nano sheet gives a direct prove of the effect of the catalyst on the growth carbon nano sheet.The carbon nano sheet is a good field emission material,and a promising candidate for catalyst support material and gas sensor material.
【Key words】 plasma enhanced chemical deposition; carbon nano-sheet; carbon nano-wall;
- 【会议录名称】 第十五届全国化合物半导体材料,微波器件和光电器件学术会议论文集
- 【会议名称】第十五届全国化合物半导体材料,微波器件和光电器件学术会议
- 【会议时间】2008-11-30
- 【会议地点】中国广东广州
- 【分类号】TB383.1
- 【主办单位】中国电子学会半导体与集成技术分会、电子材料分会