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MOCVD生长Mn掺杂GaN薄膜的结构与磁学性能研究
Studies on Structural and Magnetic Properties in Mn-Doped GaN
【作者】 崔旭高; 张荣; 陶志阔; 李鑫; 修向前; 谢自力; 郑有炓;
【Author】 Cui Xugao,Zhang Rong,Tao Zhikuo,Li Xin,Xiu Xiangqian,Xie Zili,Zheng Youdou (Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials, Department of Physics,Nanjing University,Nanjing 210093,China)
【机构】 南京大学物理系江苏省光电信息功能材料重点实验室;
【摘要】 用MOCVD技术在[0001]取向的蓝宝石衬底上生长出Mn掺杂的GaN薄膜。测试结果表明,Mn掺杂浓度小于2.7%时没有第二相物质出现。Raman谱结果表明,由于Mn离子的介入,替换了Ga位的阳离子,从而使得A1(LO)模的振动峰向低频方向移动。ESR结果表明,二价的Mn离子替换了三价的Ga离子,尽管如此,薄膜还是仅仅表现出顺磁性。通过Brillouin函数拟合以及ESR结果综合考虑可得,Mn在GaN晶格中的存在状态是孤立的二价顺磁性离子。
【Abstract】 Mn-doped GaN epitaxial films(Ga1-xMnxN) were grown on sapphire[0001]by metal organic chemical vapor deposition(MOCVD).Mn concentration was determined by energy dispersive spectrometry(EDS).For Ga1-xMnxN with x up to 0.027,no secondary phases except for GaN were detected by high resolution X-ray diffractometer(XRD).Raman scattering spectra shows that the longitudinal optical phonon mode A1(LO) of Ga1-xMnxN shifts towards lower frequency with increasing Mn concentration due to substitutional Mn incorporation.Room temperature electron spin resonance(ESR) measurements are performed and highly anisotropic six-fold hyperfine line indicates that the ionized Mn2+ substitutes for Ga3+ ions.However,superconductor quantum interference device(SQUID) magnetometry reveals that all homogenous Mn-doped GaN films show paramagnetic-like behaviors.From Brillouin function fit and ESR spectra,it is concluded that Mn ions are present as isolated paramagnetic centers.
- 【会议录名称】 第十五届全国化合物半导体材料,微波器件和光电器件学术会议论文集
- 【会议名称】第十五届全国化合物半导体材料,微波器件和光电器件学术会议
- 【会议时间】2008-11-30
- 【会议地点】中国广东广州
- 【分类号】TN304.055
- 【主办单位】中国电子学会半导体与集成技术分会、电子材料分会