【作者】 杨莉； 付亚波； 陈强； 张跃飞；

【机构】 北京印刷学院印刷包装材料与技术北京市重点实验室；

【摘要】 本文采用射频等离子体化学气相沉积(RF-PECVD)技术,以C2H2为碳源,Ar为稀释气体,在普通PET瓶内制备类金刚石(Diamond-like Carbon,简称DLC)薄膜作为高阻隔层。采用傅立叶红外透射光谱(FTIR)对其进行结构、成分进行分析。结果表明,射频等离子体化学气相沉积方法,可以在很短时间内于PET瓶内沉积一层纳米厚度的DLC膜。傅立叶红外透射光谱(FTIR)分析表明选用规格不同的电极,对于所制备的DLC的结构影响很大,同时薄膜结构中SP2和SP3比例和放电功率有较大的关系,而薄膜的成分受乙炔的比例的影响也不容忽视。更多还原

【Abstract】 In this paper, Diamond-like Carbon (DLC) films on the inner surface of the PET-bottle as the high gas barrier layers were deposited by radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) with C2H2 as the source of reaction and Ar as the dilution gas. The DLC film structure and composition are analyzed by FTIR. The results show that the nano-scale DLC film can be fabricated on the PET-bottle by radio frequency plasma-enhanced chemical vapor deposition in a short time. By spectrum of FTIR analyses, it is also noted the importance of electrode diameter for DLC film deposition, and the proportion of sp2 and sp3 in the DLC film was related to the plasma power, i.e. increasing power can reduce explosive time, where the ratio acetylene in the mixing gased is not ignore for the influence of the film composition.更多还原