【作者】 张宇；

【导师】 梁军生； 王大志；

【作者基本信息】 大连理工大学 ， 机械工程， 2025， 硕士

【摘要】 曲面共形微结构是未来实现机电产品集成化和结构功能一体化的重要手段,其能够充分利用物体的空间结构,大大缩小产品体积,减轻重量。在曲面共形微结构的制造技术中,转印技术具有工艺流程简单、效率高等优势,但受限于印章性能和目标曲面的曲率大小,导致共形微结构变形或结构断裂等问题。本文根据共形转印的原理与工艺流程,设计了一种基于弹性印章的曲面共形转印装置,利用弹性印章的超弹性变形与曲面充分贴合,避免了转印制造的微结构变形或结构断裂。针对该装置的转印精度检测需求,研究了基于机器视觉的曲面转印图案检测方法,实现曲面转印结构的高精度检测。本文的主要研究内容如下:(1)分析弹性印章的共形转印原理与刻板工艺,确定用于精度检测的曲面及曲面转印图案。分析共形转印机理与共形转印工艺流程,选择半球曲面作为共形转印精度检测的曲面,通过COMSOL软件对超弹性橡胶印章进行转印时的变形仿真,得到弹性印章表面的位移变化趋势,根据趋势选择同心圆组图案作为共形转印精度检测图案,最终利用模具制造弹性印章,采用光刻工艺在平面基体刻蚀出生成精度检测图案的微沟道。(2)设计与搭建基于弹性印章的曲面共形转印装置。该装置包括机械结构和控制系统,机械结构包括拾取模块、转印模块和对准模块,通过各模块之间协同运作,保证转印流程简单与高效率;控制系统采用PLC作为核心控制器,并对相关硬件选型,通过编写PLC控制程序与设计上位机可视化操作界面,最终实现对共形转印装置运动控制、参数监控和转印压力值存储及实时显示。(3)设计基于机器视觉的同心圆检测方法,标定转印装置的共形转印精度。该方案包括对图像采集模块进行硬件选型,并设计基于机器视觉的同心圆尺寸检测算法。算法包括像素当量计算、采集图像预处理、环形区域划分、最小二乘圆拟合等。通过标定得到该方法的检测误差为±0.024mm。利用同心圆检测方法对转印至半球曲面的同心圆组结构进行直径检测,将检测的数据进行处理得到该装置的重复性精度在±0.038mm内、共形转印精度在±0.079mm以内。最后设计亮灯电路,验证了装置制造的共形微结构具有良好的连续性。更多还原

【Abstract】 The conformal micro-structure on the curved surface is an important means to achieve the integration of electromechanical products and the integration of structure and function in the future.It can make full use of the spatial structure of the object,greatly reducing the volume of the product and reducing the weight.Among the manufacturing technologies of the conformal micro-structure on the curved surface,the transfer printing technology has the advantages of a simple process flow and high efficiency.However,it is limited by the performance of the stamp and the curvature of the target curved surface,resulting in problems such as deformation or structural fracture of the conformal micro-structure.According to the principle and process flow of conformal transfer printing,a curved surface conformal transfer printing device based on an elastic stamp is designed in this paper.The super-elastic deformation of the elastic stamp is fully fitted with the curved surface,avoiding the deformation or structural fracture of the pattern micro-structure manufactured by transfer printing.Aiming at the demand for the transfer printing precision detection of this device,a detection method for the curved surface transfer printing pattern based on machine vision is studied to achieve high-precision detection of the curved surface transfer printing structure.The main research contents of this paper are as follows:(1)The conformal transfer printing principle and the plate-making process of the elastic stamp are analyzed,and the curved surface and the curved surface transfer printing pattern for precision detection are determined.The conformal transfer printing mechanism and the conformal transfer printing process flow are analyzed.The hemispherical curved surface is selected as the curved surface for the conformal transfer printing precision detection.Through the deformation simulation of the super-elastic rubber stamp during transfer printing by COMSOL software,the displacement change trend of the surface of the elastic stamp is obtained.According to the trend,the concentric circle group pattern is selected as the conformal transfer printing precision detection pattern.Finally,the elastic stamp is manufactured by using a mold,and the micro-channels for generating the precision detection pattern are etched on the planar substrate by using the photolithography process.(2)The curved surface conformal transfer printing device based on an elastic stamp is designed and built.This device includes a mechanical structure and a control system.The mechanical structure includes a pickup module,a transfer printing module and an alignment module.Through the coordinated operation of each module,the simplicity and high efficiency of the transfer printing process are guaranteed.The PLC is used as the core controller in the control system,and the relevant hardware is selected.By writing the PLC control program and designing the visual operation interface of the upper computer,the motion control,parameter monitoring,storage and real-time display of the transfer printing pressure value of the conformal transfer printing device are finally realized.(3)The concentric circle detection method based on machine vision is designed to calibrate the conformal transfer printing precision of the transfer printing device.This scheme includes the hardware selection of the image acquisition module and the design of the concentric circle size detection algorithm based on machine vision.The algorithm includes pixel equivalent calculation,preprocessing of the acquired image,division of the annular region,least squares circle fitting,etc.Through calibration,the detection error of this method is±0.024mm.The concentric circle detection method is used to detect the diameter of the concentric circle group structure transferred to the hemispherical curved surface.The detected data are processed,and it is obtained that the repeatability precision of this device is within±0.038mm and the conformal transfer printing precision is within±0.079mm.The final design of the illumination circuit verified the excellent continuity of the conformal microstructures fabricated by the device.更多还原