【作者】 李凡；

【导师】 李鹏；

【作者基本信息】 新疆大学 ， 物理学， 2022， 硕士

【摘要】 随着科技进步和信息时代发展,传感器作为一种能够传递信息的工具,得到了快速的发展。在众多的传感器中,湿度传感器与人类的联系比较密切,在人类生活的各个领域都扮演着重要的角色。因此人们一直致力于高性能湿度传感器的探索。在湿度传感器中,敏感材料作为其重要的部件,受到研究者的广泛关注。SnO₂是一种常见的金属氧化物半导体材料,由于其禁带较宽、结构简单、选择性好、成本低廉等优点,常被用作湿敏材料。本文主要采用水热法制备了ZnO、ZnS、SnO₂、ZnO/SnO₂和ZnS/SnO₂,并对制备材料的物理化学性质展开了一系列表征。利用上述材料制作相对应的湿度传感器,通过测试系统对其湿敏性能进行研究,并分析湿度传感器的传感机理。本论文的研究内容包括以下两个方面:（1）通过水热法制备出ZnO、SnO₂和ZnO/SnO₂复合材料,用XRD、TEM、SEM、XPS、FTIR、UV-vis和BET等表征方法对材料的成分、形貌、氧空位含量、含氧官能团、带隙能量以及比表面积进行表征。结果表明:ZnO为六方纤锌矿结构,SnO₂为正方金红石结构,此外,ZnO/SnO₂复合材料表面会产生大量的氧空位并且具有大的比表面积。最后,通过构建湿度传感器,对制备所得的复合材料的湿敏性能进行充分研究。研究结果表明:当Zn和Sn的摩尔比为Zn:Sn=1:10,反应时间为5 h,反应温度为100℃时,制备的ZnO/SnO₂复合材料用于湿度传感器时表现出最好的湿敏性能,将该湿度传感器标记为Z/S-2。在室温下,此湿度传感器在工作频率为100 Hz,相对湿度（RH）为11%-95%时,能够实现高的响应（R=1225361%）,好的线性度,小的滞后性（6.6%）,短的响应和恢复时间（35 s和8 s）,以及长期稳定性。最后,通过分析复阻抗谱,进一步解释了Z/S-2湿度传感器的湿敏机理。该ZnO/SnO₂复合材料的成功制备为设计一种具有高湿敏性能的SnO₂基电阻式湿度传感器提供了新的思路。（2）通过水热法制备了ZnS、SnO₂和ZnS/SnO₂复合材料,用上述方法对其进行表征和湿敏性能的研究。表征结果表明:ZnS为立方闪锌矿结构,SnO₂为正方金红石结构,ZnS/SnO₂复合材料上具有大量的亲水官能团以及大量的氧空位。湿敏性能研究结果表明:当ZnS和SnO₂的摩尔比为1:15,反应时间为12 h,反应温度为200℃时,制备的ZnS/SnO₂复合材料用于湿度传感器时表现出最好的湿敏性能,将该湿度传感器标记为ZSO2。在室温情况下,该湿度传感器在工作频率为100 Hz时,在11%RH-95%RH内,具有高的响应（2138648.8%）,好的线性度,小的滞后性（2.4%）,短的响应和恢复时间（6.9 s和17.3 s）。最后,通过复阻抗谱,来解释ZSO2湿度传感器的传感机理。更多还原

【Abstract】 With the advancement of technology and the development of the information age,sensors have developed rapidly as a tool that can transmit information.Among the numerous sensors,humidity sensors play an important role in various fields of human life due to their close relationship with humans.Therefore,people have been committed to the research of humidity sensor with high performance.As an important part of humidity sensors,humidity-sensitive materials have received extensive attention from researchers.As a common metal oxide semiconductor material,SnO₂ is often used as a humidity-sensitive material in recent years because its advantages such as wide band gap,simple structure,good selectivity,and low cost.In this paper,ZnO,ZnS,SnO₂,ZnO/SnO₂ and ZnS/SnO₂ were prepared by hydrothermal method.A series of characterizations were carried out on the physical and chemical properties of the prepared materials.The corresponding humidity sensor was fabricated by using the above materials,and its humidity sensitive performance was researched through the test system,and the sensing mechanism of the humidity sensor was analyzed.The research content of this paper includes the following two aspects:（1）ZnO,SnO₂ and ZnO/SnO₂ composite materials were prepared by hydrothermal method.The composition,morphology,oxygen vacancy content,oxygen-containing functional groups,band gap energy and specific surface area were characterized by XRD,TEM,SEM,XPS,FTIR,UV-vis and BET.The results show that ZnO has a hexagonal wurtzite structure and SnO₂ has a tetragonal rutile structure.In addition,the ZnO/SnO₂composite has a large number of oxygen vacancies and a large specific surface area.Finally,by constructing humidity sensor,the humidity sensitivity performance of the prepared composite materials were fully studied.The research results show that when the molar ratio of Zn and Sn is 1:10,the reaction time is 5 h,and the reaction temperature is100℃,the prepared ZnO/SnO₂ composite material shows the best humidity sensitivity performance for the humidity sensor,and the humidity sensor is marked as Z/S-2.At room temperature,the humidity sensor can achieve high response（R=1225361%）,good linearity,small hysteresis（6.6%）,short response and recovery times（35 s and 8 s respectively）,and long-term stability when the operating frequency is 100 Hz and relative humidity（RH）is 11%-95%.Finally,the humidity-sensing mechanism of the Z/S-2humidity sensor is further explained by analyzing complex impedance spectrum.The successful preparation of ZnO/SnO₂ composite material provides a new direction for designing a SnO₂-based resistive humidity sensor with high humidity sensitivity.（2）ZnS,SnO₂ and ZnS/SnO₂ composites were prepared by hydrothermal method,and their characterization and humidity sensitive properties were studied by the above methods.The characterization results show that:ZnS has a cubic sphalerite structure,SnO₂ has a square rutile structure,and the ZnS/SnO₂ composite has a large number of hydrophilic functional groups and a large number of oxygen vacancies.The results of humidity-sensing performance studies show that when the molar ratio of ZnS and SnO₂is 1:15,the reaction time is 12 h,and the reaction temperature is 200℃,the prepared ZnS/SnO₂ composite material shows the best humidity-sensing properties for the humidity sensor,and the is humidity sensor is labeled as ZSO2.At room temperature,the humidity sensor has high response（2138648.8%）,good linearity,small hysteresis（2.4%）,short response and recovery times（6.9 s and 17.3 s）in the operating frequency of 11%RH-95%RH at 100 Hz.Finally,the sensing mechanism of the ZSO2 humidity sensor is explained by complex impedance spectrum.更多还原