【作者】 李娜；

【导师】 董林；

【作者基本信息】 郑州大学 ， 凝聚态物理， 2023， 硕士

【摘要】 柔性压力传感器在如今信息化社会中引起了广泛的关注,已应用于健康监测,柔性机器人和人机界面等领域。基于压阻效应、电容效应、压电效应、摩擦电效应、应力发光（Mechanoluminescence,ML）效应的柔性压力传感器呈现出柔性、轻便、灵敏、可重复性好以及易于制造的特点,这些优点使柔性压力传感器成为电子皮肤（Electronic skin,E-skin）的理想组成部分,可以用于开发智能穿戴设备、医疗设备、机器人等各种应用。尽管如此,柔性传感器也存在一些限制,其响应范围通常较小。这是因为它们的灵敏区域通常较小,当施加的压力超过其检测范围时,传感器的响应可能不够准确或完全失效。因此,开发具有宽响应范围的传感器件不仅可以测量不同程度的压力,从而提高了测量的准确性,而且能够覆盖更广泛的应用场景,从而减少了需要多个传感器的情况,这可以降低成本并提高效率。改变传感器的结构、使用多层结构以及集成多种模式传感器等方法被用来提高柔性压力传感器的响应范围。这种柔性传感器将为物联网中的人机交互提供一个广泛适应的平台。在这里,我们基于泡沫镍制备了多孔聚二甲基硅氧烷（Polydimethylsiloxane,PDMS）@银纳米线（Silver nanowire,Ag NWs）薄膜,制备了柔性多孔摩擦电传感器。响应范围在0.91–450 Pa。探究了器件结构对摩擦电性能的影响,其次,作为单电极摩擦纳米发电机（Single electrode triboelectric nanogenerator,SE-TENG）,输出电压和短路电流分别为140 V、5μA。具有良好的电学性能。具有100 ms的快速响应时间,能进行20000次循环稳定性。通过外接电阻、电容器和LED小灯泡来证明SE-TENG具有良好的电学性能和充电能力。另外,PDMS@Ag NWs薄膜具有优异的压阻性能,通过将摩擦电和压阻集成制备了双模传感器。我们进一步研究了传感器的拉伸与压缩性能,制备的泡沫结构PDMS@Ag NWs薄膜增加了压缩过程中导电材料的接触,从而拓宽了普通压阻传感器的检测范围,其压缩响应范围为0.3–1894.7 k Pa,同时提高了灵敏度。制备的双模传感器可以检测0.91 Pa–1894.7 k Pa的超宽范围压强,并且具有5000次循环稳定性。将Sr Al₂O₄:Eu²⁺,Dy³⁺（SAOED）荧光粉掺入PDMS@Ag NWs制备了三模式传感器（摩擦电/压阻/ML）,其中,三模式传感器中的ML传感器可以实现1 MPa–30 MPa的高压范围检测。通过集成三模式传感器实现了超宽范围0.91 Pa–30 MPa的响应。通过与其他不同类型的传感器对比,我们制备得三模式传感器实现了目前最宽的响应范围。最后,将三模式传感器粘附在手指上制备成触觉手套,可以作为触觉传感器来模拟触觉感知。更多还原

【Abstract】 Flexible pressure sensors have attracted a lot of attention on today’s information society and have been applied to health monitoring,flexible robotics and human-machine interfaces.Flexible pressure sensors based on piezoresistive,capacitive,piezoelectric,triboelectric,and mechanoluminescence（ML）effects are flexible,lightweight,sensitive,reproducible,and easy to manufacture.These advantages make flexible pressure sensors an ideal component of electronic skin（E-skin）and can be used to develop smart wearable devices,medical devices,robots,and other applications.Nevertheless,the measurement range of flexible pressure sensors is limited.This is because their sensitivity area is usually small,and when the applied pressure exceeds its detection range,the sensor’s response may not be accurate enough or may fail completely.Therefore,the development of sensor devices with a wide response range not only allows the measurement of different levels of pressure,improving measurement accuracy,but also enables the coverage of a wider range of application scenarios,reducing the need for multiple sensors,which can reduce costs and increase efficiency.Methods such as changing the structure of the sensor,using multi-layer structures and integrating multiple mode sensors are used to improve the response range of flexible pressure sensors.Such flexible sensors will provide a widely adaptable platform for human-computer interaction in the Internet of Things.Here,we prepared a flexible porous polydimethylsiloxane（PDMS）@silver nanowire（Ag NWs）film based on nickel foam to prepare a flexible porous frictional electric sensor.The response range was in the range of 0.91–450 Pa.The effect of device structure of the triboelectric properties was investigated,followed by the output voltage and short-circuit current of 140 V and 5μA,respectively,as single electrode triboelectric nanogenerator（SE-TENG）with good electrical properties.With a fast response time of 100 ms it is capable of 20,000 cycles of stability.The good electrical performance and charging capability of SE-TENG are demonstrated by external resistors,capacitors and small LED bulbs.In addition,the PDMS@Ag NWs film has excellent piezoresistive properties,and a dual-mode sensor was prepared by integrating triboelectricity and piezoresistivity.The tensile and compressive properties of the sensor were further investigated,and the prepared PDMS@Ag NWs film with foam structure increased the contact of the conductive material during the compression process,thus broadening the detection range of the common piezoresistive sensor with a compressive response range of 0.3–1894.7 k Pa while improving the sensitivity.The prepared dual-mode sensor can detect an ultra-wide range of pressure on 0.91 Pa–1894.7 k Pas and has a stability of 5000cycles.A tri-mode sensor（triboelectricity/piezoresistivity/ML）was prepared by doping Sr Al₂O₄:Eu²⁺,Dy³⁺（SAOED）phosphor into PDMS@Ag NWs,in which the ML sensor in the tri-mode sensor can achieve a high pressure range of 1 MPa–30MPa detection.By integrating tri-mode sensors,the ultra-wide response range of 0.91Pa–30 MPa is achieved.By comparing with other different types of sensors,we prepared the tri-mode sensor to achieve the widest response range available.Finally,the tri-mode sensor is adhered to the finger to prepare a tactile glove,which acts as a tactile sensor to simulate tactile perception.更多还原