【作者】 王浩；

【导师】 罗为；

【作者基本信息】 华中科技大学 ， 电子信息（专业学位）， 2022， 硕士

【摘要】 微环谐振器的高Q值、小尺寸、侵入性小、抗扰能力强等优点使其成为最具潜力的光学器件之一,在传感领域具有丰富的应用场景。微环谐振器的传感机理是基于折射率传感,可分为微环包层折射率传感和微环波导折射率传感两种传感模式。本文设计并制作了一款直通型聚苯乙烯波导微环谐振器,将其封装成稳定可测试的光学折射率传感器件,分别对微环谐振器的两种折射率传感模式进行研究、测试、优化以及应用。本文的具体工作如下:首先从微环基础理论出发,研究了微环结构参数与其性能的关系,使用COMSOL仿真设计出一款适用于折射率传感的高Q值直通型微环谐振器。基于仿真的结构参数采用光刻-刻蚀工艺制作出硅模具,再采用纳米压印技术成功制备出尺寸、形貌均符合预期的聚苯乙烯波导微环谐振器,并将其封装成稳定可测试的折射率传感器件。然后研究了基于微环包层折射率变化的传感模式,将NaCl溶液作为微环的上包层,搭建包层折射率传感测试系统,测试单微环谐振器对NaCl溶液的折射率灵敏度为39.64nm/RIU。采用基于游标效应的双微环级联结构进行优化,测试其对NaCl溶液的折射率灵敏度为2494.6 nm/RIU,与单微环相比提升了约63倍,线性拟合优度达0.9979。最后研究了基于微环波导折射率变化的传感模式,通过施加声压来改变聚苯乙烯波导的折射率。搭建声压传感测试系统,测试不同频率声信号的响应灵敏度,最高灵敏度为40 mV/kPa。将声压传感进行拓展应用,设计了基于声压传感的三微环阵列声源定位系统并对其优化,通过仿真验证了算法的正确性,通过实验测试了声源定位的准确性,测试得到声源位置与设定值的最大误差半径仅为6.3287 mm。更多还原

【Abstract】 The advantages of micro-ring resonators,such as high Q value,small size,low invasiveness,and strong anti-interference ability,make them one of the most potential optical devices,with rich application scenarios in the field of sensing.The sensing mechanism of micro-ring resonators is based on refractive index sensing,which can be divided into two modes: micro-ring cladding refractive index sensing and micro-ring waveguide refractive index sensing.In this paper,we design and fabricate a straight-through polystyrene waveguide micro-ring resonator,package it into a stable and testable optical sensor device,and investigate,test,optimize and apply the two refractive index sensing modes of the micro-ring resonator respectively.The specific work of this paper is as follows.Firstly,the relationship between the structural parameters of micro-ring and its performance is investigated from the basic theory of micro-ring,and a high-Q straight-through micro-ring resonator for refractive index sensing is designed using COMSOL simulation.Based on the simulated structural parameters,a silicon mold was fabricated by photolithography-etching process,and then a polystyrene waveguide micro-ring resonator with the expected size and shape was successfully fabricated by nanoimprinting technique and packaged into a stable and testable refractive index sensor device.Then the sensing mode based on the refractive index change of the micro-ring cladding was investigated,the NaCl solution was used as the upper cladding layer of the micro-ring,and the cladding refractive index sensing test system was built to test the refractive index sensitivity of the single micro-ring resonator to the NaCl solution,which was tested to be 39.64 nm/RIU.A double micro-ring cascade structure based on the vernier effect was used for optimization,and its refractive index sensitivity to NaCl solution was tested to be 2494.6nm/RIU,which was about 63 times better than that of a single micro-ring,and the linear fit is excellent to 0.9979.Finally,the sensing mode based on the change of refractive index of micro-ring waveguide is studied,and the refractive index of polystyrene waveguide is changed by applying acoustic pressure.An acoustic pressure sensing test system was built to test the response sensitivity of acoustic signals at different frequencies,the maximum sensitivity is 40 mV/kPa.The sound pressure sensing is extended and applied to design a three micro-rings array sound source localization system.The correctness of the algorithm is verified by simulation,and the accuracy of the sound source localization is tested by experiments,the maximum error radius between the test value and the set value of the sound source position is only 6.3287 mm.更多还原