【作者】 谭伟；

【导师】 闫力松； 马冬林；

【作者基本信息】 华中科技大学 ， 软件工程（专业学位）， 2022， 硕士

【摘要】 成像光学系统是帮助人们观察世界的工具,随着如今科技的发展,对光学系统的要求也逐步提高。离轴反射系统相对于常用的折射和折反射式系统,有着无色差,使用波段广,大视场,大口径以及体积小等优点,具有良好的应用前景。文章主要从像差理论入手,分析离轴反射系统中存在的离轴矢量像差,用以指导后续离轴反射系统的设计优化。并引入光线追迹方法,分析赛德尔像差系数与系统中各反射面之间的联系,以此进行初始结构的设计。在光线追迹求解的初始结构基础上,对应用于中红外波段的离轴三反系统和极紫外波段的离轴六反投影系统进行了研究。对于离轴三反系统,基于经典的离轴三反校像散(three-mirror anastigmat,TMA)系统,引入扫描机制来保证在大视场的情况下仍有较高的分辨率。在设计过程中,需要一个实的出瞳来容纳扫描镜。基于光线追迹方法求得同轴初始结构,在优化过程中逐步增大视场,最终得到了大视场高通量望远镜的设计,最终参数为F数为6,视场为60°×1.5°,焦距长876 mm,且最后成像质量趋近于衍射极限。对于离轴六反投影系统,通过光线追迹列出对应方程,通过设置不同的初始条件,求解得到初始结构,在优化过程中,先以较小的数值孔径(numerical aperture,NA),作为优化起点,在增大NA时同时增加优化变量,最后得到两个不同结构的离轴六反系统,同时满足设计要求,瞬时像方视场均为26 mm×1.5 mm,放大率为4,NA为0.25,成像质量全视场平均波像差约为0.04λ,畸变1 nm,到达衍射极限。更多还原

【Abstract】 People always observe the world with the imaging optical systems.With the development of technology,the requirements for optical systems are gradually increasing.Compared with the commonly used refraction and catadioptric systems,the off-axis reflection system has the advantages of no chromatic aberration,wide wavelength,large field of view,large aperture and small size,and has a good application prospect.Based on the vector aberration theory,the off-axis vector aberration existing in the off-axis reflective system is analyzed to guide the design and optimization of the off-axis reflective system.Then the ray tracing method is introduced to analyze the relationship between the Seidel aberration coefficient and each reflecting surface in the system,which is used to design the initial structure.Based on the initial structure,the off-axis three-mirror system applied in the mid-infrared band and the off-axis six-mirror projection system in the extreme ultraviolet band are explorated.Based on the classic off-axis three-mirror anastigmat system,a scanning mechanism is introduced to ensure high resolution in the case of a large field of view.During the design process,a real exit pupil is needed to accommodate the scanning mirror.The field of view is continuously increased during the optimization process based on the initial structure solved by ray tracing,and finally the design of a high-throughput telescope with a large field of view is obtained.The final parameter is an F number of 6 and a field of view of 60° ×1.5°,the focal length is 876 mm,and the final image quality is close to the diffraction limit.For the off-axis six-mirror projection system,the corresponding equations are listed through ray tracing,and the initial structure is obtained by setting different initial conditions.In the optimization process,a smaller numerical aperture is used as the starting point for optimization.Finally two off-axis six-inverse systems with different structures are obtained,which all meet the design requirements.The image field of view is 26 mm × 1.5mm,the magnification is 4,the NA is 0.25,the average wave aberration of the entire field of view is about 0.04λ,and the distortion is 1nm,reaching the diffraction limit.更多还原