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面内行波直线超声电机的研究

Research on In-plane Traveling Wave Linear Ultrasonic Motor

【作者】 陈亮;

【导师】 杨淋;

【作者基本信息】 南京航空航天大学 , 机械设计及理论, 2021, 硕士

【摘要】 随着科学技术的发展,高新技术领域对精密驱动部件的要求越来越高。直线超声电机作为一种新型驱动器具有响应速度快、直接驱动负载、位移分辨率高等优点,在航空航天与精密制导等关键领域具有广阔的应用前景。基于目前国内市场对高精度直线超声电机的需求,同时作为对现有直线超声电机新型结构的扩充,本文参考目前应用最成功、技术最成熟的行波旋转超声电机的结构与工作原理,设计并研制了一款新型面内行波直线超声电机。为此展开了一系列研究工作:(1)提出并设计了一款利用面内行波驱动的直线超声电机。对电机结构设计与工作原理进行详细介绍,并利用有限元方法对定子结构尺寸参数进行设计。(2)基于有限元软件ADINA建立了考虑定、动子三维接触的整机动力学模型。利用该模型验证电机工作原理的可行性,分析电机的接触机理,并预测电机的机械输出性能。为电机的结构优化提供了仿真依据。(3)制作原理样机,搭建实验测试平台对电机进行性能测试与原理可行性验证。实验发现由于定子振幅偏小而导致电机性能偏低。为了提高电机性能,以仿真结果为依据对电机结构进行改进。(4)基于改进后的尺寸制作了原理样机,搭建了更加完善的实验测试平台,对改进后的电机进行了一系列实验研究。实验测得定子两相模态频率完全相同,并且定子驱动齿的径向振幅提高了约4倍;机械性能测试表明电机的最大速度为235mm/s和最大负载为2.5N,较改进前电机性能提升明显;在脉冲驱动模式下测得电机的最小步距可以达到50nm。

【Abstract】 With the development of science and technology,the demand for precision drive components in the high-tech field is getting higher and higher.As a new type of driver,linear ultrasonic motor has the advantages of fast response,direct drive load,high displacement resolution,etc.,and has broad application prospects in fields such as aerospace and precision guidance.Based on the current domestic market demand for high-precision linear ultrasonic motor,a novel in-plane traveling wave linear ultrasonic motor is proposed in this paper,which is referring to the structure and working principle of the most successful traveling wave rotate ultrasonic motor.The main contents and results of the research are as follows:(1)A linear ultrasonic motor driven by in-plane traveling wave is proposed and designed.The motor’s structure and working principle are introduced in detail,and the stator’s dimension parameters are designed by finite element method.(2)A dynamic model considering the three-dimensional contact between the stator and the slider is established based on ADINA.This dynamic model is used to verify the feasibility of the motor’s working principle,analyze the motor’s contact mechanism and predict the motor’s mechanical output performance.It provides a simulation basis for the structural optimization of the motor.(3)In order to test the mechanical output performance of the prototype,the testing system is established.It is found that the motor’s performance is low due to the small amplitude of stator vibration.Therefore,in order to improve the performance,the structure of the motor is optimized based on the simulation results.(4)The vibration characteristic and the performance tests for the optimized motor are conducted.Firstly,the vibration characteristic test shows that the two-phase modal frequencies of the stator are exactly the same,and the radial amplitude of the stator is increased by about 4 times.Secondly,the performance test indicates that the maximum speed of the motor is 235mm/s and the maximum load is2.5N,which is significantly improved compared to the performance of the motor before optimization.At last,the minimum step distance of the motor measured in the pulse drive mode can reach 50 nm.

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