【作者】 王茜；

【导师】 王璞；

【作者基本信息】 北京工业大学 ， 光学工程（专业学位）， 2021， 硕士

【摘要】 随着微纳光子学的深入研究,微纳光子器件向新材料、多功能、高精度、三维结构等方向发展,这对器件的制备技术提出了更高的要求,各种新型制备技术应运而生。其中,飞秒激光三维直写系统具有独特的优势。作为激光直写系统的工作光源及核心部件,飞秒激光器可使其具有更广的应用领域和更精细的三维直写能力。同时,凭借在光束质量,集成度,成本等方面优势,全光纤飞秒激光器正逐渐替代钛宝石激光器成为飞秒激光直写系统的激光源。本论文以研制具有高单脉冲能量的掺镱全光纤飞秒激光三维直写系统为研究目标,系统的开展了包括超快掺镱光纤振荡器、高能量啁啾脉冲放大系统、飞秒激光器工程化样机以及飞秒激光三维直写系统设计搭建等方面的研究。以下为本论文的主要研究内容:1.全光纤结构超短脉冲光纤振荡器理论和实验研究在耗散孤子锁模区间,搭建了基于环形腔结构的半导体可饱和吸收镜耗散孤子被动锁模光纤激光器,输出激光中心波长1030 nm,平均功率3 m W,脉冲重频34.2 MHz,去啁啾后脉宽为1.117 ps;在色散管理孤子锁模区间,搭建了基于线形腔结构的啁啾光纤布拉格光栅色散管理孤子被动锁模光纤激光器,输出激光中心波长1033 nm,3 d B光谱宽度21 nm,平均功率5.5 m W,脉冲重频48 MHz,脉冲宽度2.858 ps。2.高能量飞秒掺镱光纤啁啾脉冲放大系统研究首先对啁啾脉冲放大系统中常用的脉冲展宽器与脉冲压缩器的主要参数进行了对比分析。利用色散管理孤子被动锁模光纤激光器作为种子源,长距离保偏单模光纤加光纤反射镜组成双程脉冲展宽器,两级纤芯预放大和一级包层主放大器以及透射式衍射光栅对为脉冲压缩器搭建了具有高单脉冲能量的掺镱全光纤飞秒啁啾脉冲放大系统。获得中心波长1033 nm,平均功率10 W,重频500 k Hz,脉宽634 fs,单脉冲能量20μJ,峰值功率31.54 MW的超短脉冲激光输出,光束质量因子M~2在水平和垂直方向分别为M_x~2=1.44、M_y~2=1.65。3.飞秒激光三维直写系统研究为进一步提升高能量飞秒光纤啁啾脉冲放大系统集成度,自主设计了激光器泵浦源驱动板以及串口屏控制板硬件电路,并利用VS-Code和USART-HMI软件分别对微控制器以及智能串口屏编写相应控制程序,采用Solid Works软件对激光器样机的机械尺寸进行集成化设计,并对工程化样机进行了90分钟功率稳定性测试。最后通过完成对高精密光束调节系统、显微成像系统以及三维刻写平台的设计搭建工作后,成功研制出一套完整的飞秒激光三维直写系统,并利用该直写系统在光纤表面进行了单点刻写以及线刻蚀操作。更多还原

【Abstract】 With the further research of micro/nano photonics,micro/nano photonic devices are developing towards the direction of new materials,multi-function,high precision and three-dimensional structure,which puts forward higher requirements for the fabrication technology of devices,and various new fabrication technologies arise at the right moment.Femtosecond laser 3D direct writing system has unique advantages.As the working light source and the core component of laser direct writing system,femtosecond laser can be used in a wider range of applications and has a finer 3D direct writing capability.At the same time,due to its advantages in beam quality,integration and cost,all-fiber femtosecond laser is gradually replacing Ti:Sapphire laser as the laser source of femtosecond laser direct writing system.In this paper,the main research objective is to develop a high energy ytterbium-doped all-fiber femtosecond laser,and the systematic research has been carried out including ultra-fast ytterbium-doped fiber oscillator,high energy chirped pulse amplification system,engineering prototype of femtosecond laser and design and construction of femtosecond laser three-dimensional direct writing system.The main contribution and innovaton of this dissertation are presented as follows:1.Research on all-fiber ytterbium-doped ultrafast laser oscillatorIn the dissipative soliton mode-locked region,a semiconductor saturable absorber mirror dissipative soliton passively mode-locked fiber laser based on ring cavity structure is constructed.The central wavelength of output laser is 1030 nm,the average power is 3 m W,the pulse repulse frequency is 34.2 MHz,and the pulse width after unchirped is 1.117 ps.A chirped fiber bragg grating dispersion-managed soliton passively mode-locked fiber laser based on linear cavity structure was constructed in the dispersion-managed soliton mode-locked region.The central wavelength of the output laser was 1033 nm,the spectral width of 3 d B was 21 nm,the average power was 5.5 m W,the pulse repetition frequency was 48 MHz,and the pulse width was 2.858ps.2.Research on High pulse energy femtosecond ytterbium-doped chirp pulse amplification systemFirstly,the main parameters of pulse expander and pulse compressor commonly used in chirped pulse amplification system are compared and analyzed.A ytterbium-doped all-fiber femtosecond chirped pulse amplification system with high monopulse energy was constructed using a dispersion-managed soliton mode-locked fiber laser as the seed source,a long-distance polarization-maintaining single-mode fiber and a fiber mirror constitute a dual-path pulse stretcher,a two-stage core preamplifier,a primary cladding amplifier and a transmission diffraction grating pairs as the pulse compressor.An ultrashort-pulsed laser with a central wavelength of 1030 nm,an average power of10 W,a repetition frequency of 500 k Hz,a pulse width of 634 fs,a single pulse energy of 20μJ,and a peak power of 31.54 MW was obtained.The beam quality M~2factors in horizontal and vertical directions are respectively M_x~2=1.44 and M_y~2=1.65.3.Research on three-dimensional femtosecond laser direct writing systemIn order to further improve the integration of high-energy femtosecond chirped pulse amplification system,the hardware circuit of laser pump source driver board and serial port panel control board was independently designed,and corresponding control programs were written for the microcontroller and intelligent serial port panel by using VS-Code and USART-HMI software.Solid Works software was used to design the integrated mechanical dimensions of the laser prototype,and the power stability of the engineering prototype was tested for 90 minutes.Finally,a complete femtosecond laser three-dimension direct writing system was successfully developed after the design and construction of the high precision beam regulation system,microscopic imaging system and three-dimension writing platform.Single point writing and line etching on the optical fiber surface have been carried out by using the direct writing system.更多还原