【作者】 张恒；

【导师】 陈培锋；

【作者基本信息】 华中科技大学 ， 光学工程， 2021， 硕士

【摘要】 环形抛物面反射镜是位标器等光学系统的关键光学元件。本文成功研制了一台综合测量环形抛物面反射镜焦点弥散斑、焦距和偏心角的测量仪。该测量仪能够同时测量环形抛物面反射镜的焦距、弥散斑中心、弥散斑大小、偏角大小等多个参数,满足生产现场的测量要求。本文采取基于平行光管的测量方案,测量方案结构简单,测量方法和结果直接与系统应用要求相关,具体研究内容如下:(1)分析焦距测量、弥散斑大小测量、弥散斑中心测量和偏角大小测量方法的技术现状,提出综合测量方案,明确测量的相关参数指标。(2)提出基于平行光管测量焦距、弥散斑中心、弥散斑大小和偏角的方案,对方案进行理论分析;依据测量方案对测量系统中的光学系统、运动系统、信息采集系统进行分析,得到相关器件的设计要求;对测量仪旋转台机械误差带来的偏角测量误差进行分析,为矫正误差和降低旋转台机械结构精度要求提供思路。(3)依据测量方案对偏角测量进行仿真,验证偏角计算公式在测量小角度时适用;对旋转台机械位置误差和机械角度误差进行分析,提出180°翻转两次测量消除旋转台角度误差、降低对旋转台机械结构精度要求的方法并推导出相关公式;依据无偏角反射镜对偏角测量结果进一步校准,推导出校准公式。(4)根据确定的测量系统方案,选择合适的器件,并对部分器件进行改进,在测量仪软件操作系统开发配合下,完成测量仪的组装和调试。(5)利用带有偏角和无偏角的标准镜片对测量仪进行验证,现场应用结果证明:测量焦距的相对误差在0.1%以内,光斑大小测量满足设计要求,对于偏角的测量,采用180°翻转两次测量消除旋转台角度误差的方法,可以大大降低对系统机械结构精度要求,同时保证相对误差在4.1%以内,验证了测量方法的准确性。对偏角的测量结果进一步校准,测量结果误差小于一个角度分辨率,说明了测量仪的准确性。更多还原

【Abstract】 The toroidal parabolic mirror is the key optical element of the optical system such as the positioner.In this paper,a measuring instrument for comprehensively measuring the focus quality,focal length and eccentric angle of a toroidal parabolic mirror has been successfully developed.The measuring instrument can simultaneously measure multiple parameters such as the focal length of the annular parabolic mirror,the center of the diffuse spot,the size of the diffuse spot,the size of the deflection angle to meet the measurement requirements of the production site.Based on measurements taken herein collimator embodiment,the measuring structure is simple embodiment,the measurement results are directly related to a method and system applications,the specific contents are as follows:(1)This article analyzes the technical status of focal length measurement,the measurement of the size of the dispersion spot,the measurement of the center of the dispersion spot,and the measurement method of the deflection angle.A comprehensive measurement plan was proposed,and the relevant parameters of the measurement plan were clarified.(2)This paper proposes a scheme based on collimator to measure focal length,spot center,spot size and deflection angle.According to the measurement plan,the optical system,motion system,and information acquisition system in the measurement system are analyzed to obtain the design requirements of related devices.Analysis of the meter mechanical error caused by the turntable angle measurement error,error correction and provide ideas for reducing the mechanical structure precision turntable.(3)This paper simulates the deflection angle measurement based on the measurement scheme.The simulation results verify that the declination angle calculation formula is applicable when measuring small angles.The mechanical position error and mechanical angle error of the rotating table are analyzed,and the method of 180° flipping twice to eliminate the angle error of the rotating table and reduce the mechanical structure accuracy requirements of the rotating table is proposed and related formulas are derived.According to the non-deflection angle reflector,the deflection angle measurement result is further calibrated and the calibration formula is derived.(4)According to the determined measurement system scheme,suitable devices were selected and some devices were improved.With the development of the measuring instrument software operating system,the assembly and debugging of the measuring instrument have been completed.(5)A standard lens with deflection angle and no deflection angle was used to verify the measuring instrument.The field application results prove that the relative error of the measured focal length is within 0.1%,and the spot size measurement meets the design requirements.For the measurement of deflection angle,the method of eliminating the angle error of the rotating table by 180° flipping twice can greatly reduce the accuracy requirements of the mechanical structure of the system,while ensuring that the relative error is within 4.1%,which verifies the accuracy of the measurement method.The measurement result of the deflection angle is further calibrated,and the error of the measurement result is less than an angle resolution,which shows the accuracy of the measuring instrument.更多还原