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一种基于MEMS技术的宽光谱可调光学滤波器研究
Research on a Narrow-bandwidth Tunable Optical Filter with Ultra-wide Tuning Range
【作者】 王婷;
【导师】 万助军;
【作者基本信息】 华中科技大学 , 光学工程, 2021, 硕士
【摘要】 伴随着5G通信技术的应用和海量数据传输的需求,对光纤通信技术和光信息处理技术的要求也越来越高。可调光学滤波器(Tunable Optical Filter,TOF)作为光性能监控仪(Optical Performance Monitor,OPM)中的核心组成部分,其发展趋势是响应时间更短、调谐范围更宽、体积微型化、技术标准化。本文研究基于自由空间光学结构、采用MEMS(Micro Electro-Mechanical Systems,微机电系统)+光栅的窄带可调光学滤波器,主要工作内容如下:设计了一种基于MEMS技术的宽光谱窄带TOF,通过1×2端口光开关和阵列波导组合的方式将宽光谱信号分割成两个子波段,两个子波段的光信号在光开关控制下,分时以不同角度入射光栅,共用MEMS微镜、光栅、准直透镜和压缩透镜组成的整个自由空间光学系统。基于高斯场模型仿真分析TOF的滤波谱线与各元件参数之间的关系,据此设计了满足信道间隔为50G的传输系统中OPM需求的TOF结构参数,并通过Zemax软件建模仿真,对参数进行了优化设计。根据仿真结果,设计并加工了验证实验所需光学元件和机械零件。搭建实验平台,对所设计的TOF性能进行测试。测得C波段(1530~1570nm)中心波长插入损耗为3.36d B,3d B线宽为0.168nm,20d B线宽为0.544nm,串扰<-30d B;L波段(1570~1603nm)中心波长插入损耗为5.37d B,3d B线宽为0.158nm,20d B线宽为0.352nm,串扰<-30d B。
【Abstract】 With the application of 5G communication technology and the demand of massive data transmission,the requirements for optical fiber communication technology and optical information processing technology are getting higher and higher.Tunable optical filter(TOF)is the core device for optical performance monitor(OPM).The trend of TOF is shorter response time,wider tuning range,miniaturization and technical standardization.This paper studies narrow-band tunable optical filter based on free-space optics and employing MEMS(micro electro mechanical systems)and grating.The main contents are as follows:A narrow-band TOF with wide tuning range is designed based on MEMS technology.The wide spectrum signal is split into two sub-bands by the combination of a 1 × 2 port optical switch and a arrayed waveguide.Under the control of the optical switch,the two sub-band optical signals are time-shared and incident on the grating at different angles.The whole freespace optical system consisting of a MEMS micro mirror,a grating,a collimating lens and a compression lens is shared by the two sub-band optical signals.Based on the Gauss field model,the relationship between the filter spectrum of the TOF and the parameters of the elements is simulated and analyzed.According to the results,the TOF structural parameters are designed,which meets the requirements by an OPM for the transmission system with channel spacing of 50 GHz.The parameters are further optimized by ZEMAX software modeling and simulation.According to the simulation results,the optical elements and mechanical parts for the verification experiment are designed and fabricated.An experimental platform is built to test the performance of the above designed TOF.The results show that the insertion loss for C-band(1530~1570nm)center wavelength is 3.36 d B,3d B-linewidth is 0.168 nm,20d B-linewidth is 0.544 nm,crosstalk is less than-30 d B;the insertion loss for L-band(1570~1603nm)center wavelength is 5.37 d B,3d B-linewidth is0.158 nm,20d B-linewidth is 0.352 nm,crosstalk is less than-30 d B.