【作者】 杨媛；

【导师】 胡晓东；

【作者基本信息】 天津大学 ， 仪器科学与技术， 2020， 硕士

【摘要】 微机电系统(Micro Electro Mechanical Systems,MEMS)器件由于具有高频率,高Q值,低能耗,高灵敏度等诸多优良特性,具有广阔的发展前景,并日益成为微纳领域的研究热点。其中薄膜体声波谐振器和微悬臂梁是重要的MEMS器件,在微波、射频和传感领域有着较高的应用价值。MEMS的设计制造和表征离不开MEMS测试技术的支持,但是目前存在的各种测试方法在测试精度,测量速度,工作带宽及测量范围等方面存在或多或少的制约,同时小尺度的测试工作要测试系统具有较高的灵敏度。本课题主要研究内容归纳如下:1、从MEMS动态特性测试技术方面总结了MEMS测试技术的国内外研究现状,对不同团队测试系统的特点进行了对比,确定了本课题的主要研究方法和测试系统。2、基于外差干涉测量的思想搭建了一套MEMS振动模态测量系统,介绍了系统的设计原理及组成部分。该系统可以测量的振动频率范围约为几十赫兹到12GHz,振幅范围约为1pm至10nm。3、通过对薄膜体声波谐振器(Film Bulk Acoustic wave Resonator,FBAR)和微悬臂梁两种MEMS器件的振动模态测量,讨论了动态测试在研究MEMS器件机械特性方面起到的作用,并利用ANSYS Workbench有限元分析软件模拟仿真了微悬臂梁的前六阶振动模态,将仿真结果与利用所搭建的MEMS振动模态测量系统对样品的测试结果进行对比,分析了仿真结果中微悬臂梁扭转模态产生的原因。与以往的测试方法相比,本课题所搭建的MEMS振动模态测量系统可以同时满足高测量带宽和高灵敏度的测试需求,是测试技术上的一种进步。更多还原

【Abstract】 MEMS devices feature a variety of good qualities such as high Q value at high frequencies,low power consumption and high sensitivity,which allow them to fulfill the demanding specifications for today’s electronic applications and drive a great number of researchers to devote themselves to this field.High performance film bulk acoustic resonators and micro-cantilevers are significant MEMS devices with very good application prospects in RF and sensing areas.The design,fabrication and characterization of MEMS devices demand the support of MEMS testing technology.However the existing testing methods are not yet perfect,the accuracy,measuring speed,measuring bandwidth and measurement range still need to be optimized.To address the need for the characterization of nano-scale vibrations,a testing method with high sensitivity should be developed.The research summarized in this thesis focuses on the following key points:1.The background and development status of MEMS dynamic characterization at home and abroad are reviewed,and the measurement methods are discussed and summarized carefully.Accordingly the research methods and the testing system in this project are determined.2.A MEMS vibration mode measurement system with the frequency range from several tens of hertz to 12 GHz and the amplitude range from about 1pm to 10 nm is presented on the basis of heterodyne interferometry.3.Vibration mode test is conducted on FBAR and micro-cantilever.The role of dynamic testing in studying the mechanical characteristics of MEMS devices is discussed.The first 6 resonances of the micro-cantilever are simulated using ANSYS finite element analysis software which show good consistency with the testing result.The reason why some torsional modes with an antisymmetrical displacement referred to the line of symmetry along the longest side of t he cantilever are excited is also discussed in this thesis.Compared with the previous measurement methods,the MEMS vibration modal measurement system presented in this project can fulfill the measure ment requirements of high measurement bandwidth and high sensitivity,which is a progress in testing technology.更多还原