【作者】 解凯；

【导师】 姚玉峰；

【作者基本信息】 哈尔滨工业大学 ， 机械工程（专业学位）， 2019， 硕士

【摘要】 随着微电子领域的高速发展,微电子封装的诸多场合都迫切需求更微量、更精确、更快速的胶液分配技术。目前大多数研究集中在优势更加明显的非接触式胶液微喷方法。为满足微电子封装高速微量点胶的需求,本文研制了一款基于杠杆放大原理的压电撞针式非接触微喷阀,并围绕如何提高压电阀动态性能的问题,在压电阀撞针动态性能影响参数的分析、撞针位移在线检测装置的研制以及压电阀分配效果实验等关键技术方面进行了研究,主要内容如下:建立压电撞针式微喷阀数学模型以及多场耦合的有限元模型并进行动态性能影响参数仿真分析。首先建立压电微喷阀动力学模型对部分影响系统动态性能的参数进行分析。然后建立压电微喷阀多场耦合的有限元模型,基于该模型得到压电阀的各阶固有频率以及不同电压下压电阀撞针的静态输出位移。瞬态分析结果较好的反应压电阀的运动过程,并得到不同参数下的压电阀撞针位移曲线,基于此对影响撞针动态性能的参数展开研究。基于二水平因子的试验设计方法对影响撞针动态性能的参数进行影响程度及影响趋势分析。课题选取8个影响撞针动态性能的参数进行二水平因子设计,将得到的多组参数利用压电阀有限元模型进行仿真,得到不同参数下的撞针动态位移曲线。对表征动态性能的撞针下降时间和下降位移超调量进行统计分析,得到不同影响参数对撞针动态性能的影响程度与影响趋势,以及各因子间的交互作用影响。研制一种新型的可集成在压电阀中的撞针位移在线检测装置。为了在线检测撞针的位移状态,设计一种可集成在压电阀中的在线位移检测装置并进行位移检测精度及位移检测动态响应测试。测试结果表明该检测装置能够较好的检测撞针动态位移。而且可以根据输出电压信号的变化量来判断喷嘴此时相对于撞针的位置,从而判断两者之间是否开始接触或喷嘴拧紧程度大小。搭建实验平台进行撞针动态性能影响参数验证与胶液喷射实验。在上述研究基础上,对电压上升沿时间、电压幅值以及撞针质量等影响撞针动态响应的显著参数进行实验验证。并搭建压电阀分配系统实验平台研究驱动电压参数对胶液喷射效果的影响。最后对不同喷嘴位置下的胶液喷射进行实验分析,根据喷射效果和位移检测装置得到喷嘴位置调试的不同阶段以及对应的传感器输出电压值。该研究将为压电微喷阀喷嘴调试工作提供指导,大大减轻工作量。更多还原

【Abstract】 With the rapid development of microelectronics,there is an urgent demand for more precise,more accurate and faster adhesive materials dispensing technology in many occasions of microelectronic packaging.The traditional contact dispensing technology is hard to meet the current demand,so today,the research mainly focuses on the non-contact dispensing method with more obvious advantages.In order to meet the demand of high-speed micro-dispensing in microelectronic packaging,a kind of non-contact needle-typed jetting dispenser driven by piezoelectric actuator is proposed based on the principle of lever amplification.Based on the dynamic performance of the jetting dispenser,the research of the finite element model of the jetting dispenser,the analysis of the influence parameters of the dynamic performance of the needle,the development of the on-line detection device for the needle displacement,and the distribution effect experiment and test of the jetting dispenser are studied.The main content is as follows:A mathematical model and a finite element model of the multi-field coupling of jetting dispenser are established and the influence parameters of dynamic performance is simulated and analyzed.Firstly,the dynamic model of piezoelectricdriven jetting dispenser valve is established to analyze some parameters affecting the dynamic performance of the system.Then the finite element modeling of multi-field coupling is established.Based on the simulation analysis of the model,the natural frequencies of the jetting dispenser and the static output displacement of the piezostack model and the jetting dispenser at different voltages are obtained.The transient analysis results can better reflect the motion process of the jetting dispenser,and obtain the displacement curve of the needle of jetting dispenser under different parameters.Based on this,the factors affecting the dynamic performance of the needle are studied.Based on the Design Of Experiment method of two-level factor,the influence degree and influence trend of the performance parameters of the striker are analyzed.This subject selects eight parameters that affect the dynamic performance of the needle for two-level factor design.The obtained multi-group parameters are simulated by the finite element model of jetting dispensing,and the dynamic displacement curve of the needle under different parameters is obtained.Statistical analysis is carried out on the descending time and the downshift overshoot of the dynamic performance.The influence degree and influence trend of different influence parameters on the dynamic performance of the needle and the interaction between the factors were obtained.A new type of needle displacement on-line detection device that can be integrated into the jetting dispenser is developed.In order to detect the displacement state of the needle on-line,an on-line displacement detecting device integrated in the jetting dispenser is designed and the displacement detection accuracy and the displacement detection dynamic response test are performed.The test results show that the detection device can better detect the dynamic displacement of the needle.Moreover,the position of the nozzle with respect to the needle can be judged based on the amount of change in the output voltage signal,thereby it is able to judge whether or not the contact between the two ends or the degree of nozzle tightening.The experimental platform is set up to carry out the parameter verification of the dynamic performance of the needle and the dispensing experiment of adhesive materials is carried out.On the basis of the above research,the significant parameters affecting the dynamic response of the needle such as the voltage rise time,the voltage amplitude and the needle quality are experimentally verified.The experimental platform of the jetting dispenser distribution system is built to study the influence of the driving voltage parameters on the glue injection effect.Finally,the experimental analysis of the fluid dispensing under different needle positions is carried out,and the different stages of the nozzle position adjustment and the corresponding output voltage of sensor are obtained according to the displacement detecting device.This research will greatly lighten the workload of the jetting dispenser in the debugging process,and provide guidance for the nozzle debugging work of the piezoelectric micro-injection valve.更多还原