【作者】 张成；

【导师】 尹周平； 吴豪；

【作者基本信息】 华中科技大学 ， 机械工程， 2019， 硕士

【摘要】 接近感知和触觉感知是智能机器人传感系统必不可少的组成部分,机器人依靠接近感知传感器和触觉感知传感器的配合可以实现从感知物体位置到抓取物体的全过程监测。针对现阶段应用于机器人电子皮肤传感器功能单一、可拉伸性差、灵敏度低等一系列缺陷,本课题设计了一种用于机器人电子皮肤的多传感原理可拉伸传感器,为此本课题做了以下主要工作:（1）本文设计的传感器可以同时在摩擦发电传感和电容模式下进行压力传感测量,该传感器还能进行接近感知测量和拉伸应变测量,还用COMSOL仿真了不同结构的传感器的接近传感特性,并从其中选择出上电极面积大于下电极的结构作为本课题所研究传感器的最终结构;（2）为保证传感器的可拉伸特性,传感器采用镓合金作为电极材料,PDMS作为基底材料;为了提升传感器在摩擦发电传感模式下进行压力测量时的灵敏度,本课题在传感器表面设计了砂纸微结构;为了提升传感器在电容模式下进行压力传感的灵敏度,本课题在电介质层设计了微米孔阵列结构;（3）设计传感器制备工艺流程并制作出传感器单元及其阵列,利用液态金属对金和PDMS亲水性和疏水性的特点完成电极层的制备;采用软光刻技术和PDMS二次倒模的方法制备出具有微米孔阵列结构的电介质层;采用砂纸倒模的方法在PDMS表面复制出砂纸表面微结构;采用反应离子刻蚀工艺完成传感器最终的封装;（4）测量了传感器的相关特性,该传感器可以定位到距离传感器表面10cm的手指;在低压范围（<12KPa）,传感器在摩擦发电传感模式下的灵敏度最高可以达到1.04V/KPa,在高压（12KPa¹20KPa）区域内,传感器在电容模式下的灵敏度可以达到1.4MPa^-1,两种传感模式压力区间的互补使得传感器的压力测量区间达到<120KPa,同时该传感器还能测量到10Pa左右的压力;拉伸应变测量灵敏度最高可以达到-1.23,同时传感器具备区分压力载荷和拉伸应变的能力;（5）完成了传感器阵列及单元在仿生手上的初步应用,仿生手在距离橘子较远距离（3cm）时可以较为清晰的识别出橘子的三维形状特征,在较远距离（10cm）时,可以感知到橘子的存在;同时还做了传感器用于仿生手的压力触觉测量实验,在低压区域（<12KPa）,传感器在摩擦发电传感模式下表现出良好的压力测量能力,在高压区域（12KPa¹20KPa）,传感器在电容模式下测量结果与商用传感器表现一致。更多还原

【Abstract】 Proximity sensing and tactile sensing are an integral part of the intelligent robot sensing system.The robot relies on the proximity sensor and the tactile sensing sensor to realize the whole process monitoring from sensing the object position to grasping the object.Aiming at a series of defects,such as single function,poor stretchability,low sensitivity and narrow measurement range,the robot electronic skin sensor is designed for the Stretchable Dual-mode Sensor Array for Multifunctional Robotic Electronic Skin.We have done the following main tasks:(1)This paper designs a stretchable dual-mode sensor array for multifunctional robotic electronic skin.The sensor can perform pressure sensing measurement in both the triboelectric nanogenerator and capacitive mode.The sensor can also perform proximity sensing and tensile strain measurement in capacitive mode.Simultaneously,we used COMSOL to simulate the proximity characteristics of sensors with different structures,and Selected the final structure of the sensor from the results;(2)In order to ensure the tensile properties of the sensor,the sensor uses Galinstan as the electrode material and PDMS as the base material.In order to improve the sensitivity of the sensor in the pressure measurement based on the triboelectric nanogenerator mode,we designed the sandpaper microstructure on the sensor surface.In order to improve the sensitivity of the sensor in the capacitive mode,we designed hollow micro-pillars in the dielectric layer;(3)Prepare the process flow and prepare the experiment according to the structure and material characteristics of the designed sensor.The sensor array is prepared by the liquid metal to the hydrophilicity and hydrophobicity of gold and PDMS.The dielectric layer with the hollow micro-pillars is prepared by soft lithography and PDMS secondary mold.The sandpaper surface microstructure is replicated on the PDMS surface by sandpaper molding;the final package of the sensor is completed by reactive ion etching;(4)The sensor’s relevant characteristics are measured.The sensor can position the finger at a distance of 10 cm.In the low pressure range(<12KPa),the sensitivity of the sensor based on the triboelectric generator mode can reach 1.04V/KPa,at the high pressure(12KPa~120KPa),the sensitivity of the sensor based on capacitive mode can reach 1.4MPa-1.The complement of the pressure intervals of the two sensing modes makes the pressure measurement interval of the sensor reach <120KPa,and the sensor can also measure the pressure of about 10Pa;The measurement sensitivity of tensile strain can be up to-1.23,and the sensor can distinguish the pressure and tensile strain;Finally,we also completed the preliminary application of the sensor array and unit on the bionic hand.With the 3D shape sensing ability of the space conductor,the sensor array can clearly recognize the spatial shape characteristics of the orange at a short distance(about 3 cm),and can sense the presence of orange at a long distance(10 cm);The sensor was used for the pressure tactile measurement experiment of the bionic hand.In the low pressure range(<12KPa),the sensor showed good pressure measurement capability in the triboelectric nanogenerator mode.In the high pressure range(12KPa~120KPa),the mapping of capacitance changes in the sensors is also consistent with the measurements from commercial sensors.更多还原