【作者】 王东；

【导师】 曹永智；

【作者基本信息】 哈尔滨工业大学 ， 机械制造及其自动化， 2018， 硕士

【摘要】 微凹槽作为功能微结构的一种,在很多领域都有应用,如微流控、减阻表面等,在一些特征零件上,微凹槽也是一个重要组成部分,如弹性敏感元件、阵列结构等。金属表面的微凹槽加工中,几十微米宽的微凹槽加工相对困难,基于刀具轨迹运动加工方式能较好地填补这一空缺。基于刀具轨迹运动加工方法现有的研究充分体现了其在这一尺度范围内优秀的加工能力,但仍有很大的加工潜力,如平面的加工、几十微米宽凹槽的加工等。本文针对基于刀具轨迹运动加工的特点,建立了切削力模型,对切削过程进行了分析,探讨了不同加工参数对平面加工、凹槽加工的影响,并规划了微凹槽加工的工艺流程,具体研究内容包括以下几个方面:首先,建立了基于三棱锥刀具轨迹运动加工的切削力模型,将每个切削周期分成多个部分,分析了随着刀具的轨迹运动加工过程中未变形切削厚度、法向前角以及切削力的变化规律。对其中某一特定的前进方向进行计算分析。然后,通过一系列实验研究基于刀具轨迹运动加工的加工能力。研究压电位移台的工作特性,确定压电位移台较好的工作参数。通过不同前进方向下的切削实验,对切削力和表面形貌的进行对比分析,揭示了一次走刀时进给方向、切削深度等因素对切削力、棱边顶部毛刺、侧面平整度、凹槽宽度、底部形貌的影响规律。研究切削深度、进给速度、加工方式、步进量对平面加工时表面粗糙度的影响。最后,研究多次走刀对微凹槽侧面和凹槽底部表面粗糙度的影响。研究不同加工方法、工艺路径对微凹槽侧面形貌、槽底拐角处圆角半径的结果影响。利用最优参数组合和刀具偏转方法,规划出加工几十微米深、宽度达两百微米的T形或矩形微凹槽的工艺流程。更多还原

【Abstract】 Microgrooves,as one of the functional microstructures,are used in many fields,such as microfluidic and drag reduction surfaces.On some characteristic parts,microgrooves are also an important component,such as elastic sensitive elements,array structures,etc.In the micro groove machining of metal surface,it is relatively difficult to process the microgrooves with dozens of microns and wide,and the tool path motion processing method can better fill this vacancy.The existing research based on tool path motion processing has fully demonstrated its excellent processing ability in this scale,but still has great processing potential,such as plane processing,and the processing of dozens of microns and wide grooves.In this paper,the cutting force model is built based on the characteristics of tool path motion processing.The cutting process is analyzed,the influence of different processing parameters on the plane machining and groove machining is discussed,and the process flow of the micro groove machining is planned.The specific research contents include the following aspects:First,a cutting force model based on three pyramid tool path motion machining is established,and each cutting cycle is divided into several parts.The changing rules of the undeformed cutting thickness,the forward angle and the cutting force are analyzed with the tool trajectory moving process.Calculate and analyze a certain forward direction.Then,a series of experiments are carried out to study the machining capability based on tool path machining.The working characteristics of the piezoelectric displacement table are studied,and the working parameters of the piezoelectric displacement table are determined.Through comparison and analysis of cutting force and surface topography under different forward direction,the influence of feed direction and cutting depth on cutting force,prismatic burr,side smoothness,groove width and bottom morphology of the cutting force,cutting depth and other factors are revealed.The effects of cutting depth,feed speed,processing method and step volume on surface roughness during plane machining are studied.Finally,the effect of multiple cutting tools on the surface roughness of the micro groove and the bottom of the groove is studied.The influence of different processing methods and process paths on the side profile of the micro groove and the fillet radius at the corner of the groove is studied.Using the best parameter combination and tool deflection method,the technological process of processing T or rectangular micro grooves with tens of microns deep and two hundred microns in width is planned.更多还原