【作者】 刘强；

【导师】 黄庆忠；

【作者基本信息】 华中科技大学 ， 光学工程， 2018， 硕士

【摘要】 微电子极大推动了人类生活的发展,随着对传输速率和带宽的要求,传统电互联慢慢不满足发展的需要。硅基光子学因其高传输带宽、低成本等优势广泛用于光学芯片、光学计算和光纤通信领域中。上下话路滤波器是实现波长复用系统的关键组件,实现上下话路滤波器性能的结构主要是微环谐振器和光子晶体。随着微环半径的减小,环内的弯曲损耗增大。同时,微环谐振腔的输入端和输出端在同一侧,级联时额外的交叉增加器件的设计复杂度,也增加了整体谐振腔的尺寸。光子晶体波导和单腔组成的上下话路结构的下话路端效率不高。增加到两个腔的干涉相消可以提高下话路端效率,但增加器件尺寸。此外,光子晶体的制作工艺复杂,工艺重复性差。基于以上背景,本论文将介绍一种基于类行波法布里珀罗谐振腔(Fabry–Pérot Resonator,简称F-P腔)结构的新型上下话路滤波光子器件。该新型光子器件利用单个谐振腔,不需要额外的设计结构就实现光波定向传播,有着设计灵活、尺寸小,低损耗的优势。类F-P腔由一个直波导和两个模式反射镜组成,尺寸为34.5×1μm~2;模式反射镜反射效率达到95%,带宽80nm以上。该上下话路滤波器仿真模拟得到下话路端效率93%,品质因子达到1300。目前制作的上下话路滤波器,谐振波长处的下话路端效率也能达到68%,仅有8%的光留在直通端,品质因子为1007。增大腔长L到600μm时,品质因子可达到22000。更多还原

【Abstract】 The development of microelectronics has greatly promoted the development of human production and living.With the requirements of transmission speed and bandwidth,traditional electrical interconnects are slowly not meeting the needs of development.Silicon-based photonics is widely used in optical chips,optical computing and optical fiber communications because of its high transmission bandwidth and low cost.The add-drop filter implements the key components of the wavelength division multiplexing system.The structure that realizes the performance is mainly micro-ring resonators and photonic crystals.As the micro-ring radius of the micro-ring resonator decreases,the bending loss in the ring increases and the coupling efficiency at drop port decreases.At the same time,the input port and output port of the micro-ring resonator are on the same side.For the cascade of 2×2 devices,the extra crossover increases the design complexity of the device and also increases the size of the overall resonant cavity.The structure of add-drop filter formed by the photonic crystal waveguide and the single cavity is not very efficient at the drop port.In order to increase the efficiency,the destructive interference increases to two cavities,which can improve the efficiency of drop port,but greatly increase the size of the device.In addition,the fabrication process of photonic crystals is complicated and the process repeatability is poor.Based on the above background,this paper will introduce a new type of add-drop filter based on a single Fabry-Pérot Resonator(F-P cavity).The new add-drop filter uses a single cavity and does not require an additional design to achieve light-wave propagation.It has the advantages of flexible design,small size,and low loss.The single F-P cavity consists of a straight waveguide and two mode mirrors.The size of the single F-P cavity is 34.5×1μm~2.The simulation results show that the reflection efficiency of the mode mirror is more than 95%and the bandwidth is 80nm.The simulation results of the add-drop filter is 93%in the drop port,and the quality factor Q reaches 1300.The add-drop filter produced by the process platform has a drop efficiency of 68%at drop port,and only 8%of the light remains at the through port.The quality factor Q value also reaches 1300 or more.In addition,the quality factor Q reaches 22,000 when the cavity length L to 600μm.更多还原