【作者】 刘凯；

【导师】 张有润；

【作者基本信息】 电子科技大学 ， 微电子学与固体电子学， 2018， 硕士

【摘要】 随着社会的发展,人们对于微弱光的图像检测需求越来越急缺,而单光子探测就是解决该种问题十分有效的手段,相比于基于电荷耦合器的CMOS图像传感器和PMT的光电转换器,该技术具有探测的灵敏度高、抗干扰能力强、结构简单及易于大规模集成的优势。在航空航天、生物医药、信号传输等方面获得广泛应用,虽然具有广阔的应用前景,但该技术的发展困难是如何进行单片集成与大规模阵列应用,本文将对此展开研究。第一、传统单光子探测中,为了保证探测器件的光子探测效率,通常将器件尺寸设计过大,但这样的设计对于降低阵列面积,提高阵列的集成度是个十分巨大的挑战。故而本文将基于0.18μm CMOS工艺设计适用于大规模阵列探测器的小尺寸SPAD结构,通过优化设计,确定器件结构,绘制版图流片与进行测试验证。第二、针对无SAPD仿真模型的问题,本文将在充分调研阅读文献的基础上提出一款适用于电路仿真的器件SPICE模型,为电路设计铺平道路。其次为SPAD设计两款结构简单、性能可靠的淬灭电路:负载可变与电容淬灭电路,通过仿真表明,电路的淬灭时间低于5ns、复位时间低于1ns,满足整体死区时间小于1ns,达到高速探测的应用需求。且进行电路可靠性仿真,改变温度、偏压和电源扰动等方面,仿真结果依旧达到设计需求。第三、本文将采用一款新型的模拟计数电路,采用两个电容间的相互充放电来达到技术目的,其计数线性度表现优秀,在计数两百次内仍然线性度良好,且电路抗干扰能力优秀,整体达到了设计的目的。综上,本文针对SPAD阵列像素单元的探测器件、淬灭电路和计数电路三个部分,分别提出各自的创新设计,在保证各自性能的前提下,有效缩减了各个模块的面积,使其适用于大规模SPAD探测阵列应用。更多还原

【Abstract】 With the development of society,people are increasingly in need of image detection for weak light,and single photon detection is a very effective means to solve this problem.Compared to CMOS image sensors and PMTs based on charge couplers.The device has the advantages of high detection sensitivity,strong anti-interference ability,simple structure,and ease of large-scale integration.Although widely used in aerospace,biopharmaceuticals,signal transmission,etc.,although it has broad application prospects,the difficulty in the development of this technology is how to perform monolithic integration and large-scale array applications.This article will study this.First,in traditional single-photon detection,in order to ensure the photon detection efficiency of the detector device,the device size is usually designed to be too large.However,such design is a huge challenge for reducing the array area and improving the integration of the array.Therefore,this paper will design a small-sized SPAD structure suitable for large-scale array detectors based on 0.18μm CMOS process,optimize the design,determine the device structure,draw layouts and verify the test.Secondly,aiming at the problem of no SAPD simulation model,this article will put forward a device SPICE model suitable for circuit simulation on the basis of fully researching and reading the literature,paving the way for circuit design.Secondly,two simple and reliable quenching circuits are designed for SPAD: load variable and capacitor quenching circuits.Simulation shows that the quenching time of the circuit is lower than 5 ns,the reset time is lower than 1 ns,and the overall dead time is less than 1ns,to meet the application needs of high-speed detection.The circuit reliability simulation was performed to change the temperature,bias voltage,and power supply disturbance.The simulation results still meet the design requirements.Third,this article will use a new type of analog counting circuit,using two capacitors to achieve the technical goal of mutual charge and discharge,the excellent performance of the count linearity,still good linearity in the count 200 times,and the circuit antijamming The ability is excellent and the overall goal of design is achieved.In sμmmary,the three parts of the detector,quenching circuit and counting circuit of the SPAD array pixel unit are respectively put forward their own innovative designs.Under the premise of ensuring their respective performance,the area of each module is effectively reduced,making it suitable for Large-scale SPAD detection array applications.更多还原