【作者】 江一帆；

【导师】 李镇；

【作者基本信息】 北京理工大学 ， 电子科学与技术， 2016， 硕士

【摘要】 太赫兹技术是目前世界各国研究的重中之重,而太赫兹传输线和太赫兹天线性能的探索对太赫兹技术的应用具有重要的现实意义,如何设计并实现高集成度的太赫兹天线是太赫兹系统发展的必然方向。微机电系统(MEMS)技术因其高精度、高一致性、低成本等特点可以用来制备太赫兹天线和功能器件。在上述背景下,本文基于MEMS技术研究了太赫兹频段多层波纹喇叭天线,并进行了制备和测试。给出了太赫兹多层体硅波纹喇叭天线,具有高增益、低副瓣、方向图对称特性,解决了太赫兹天线增益低的问题。采用了多层工艺与MEMS工艺结合的方法,给出了多层MEMS工艺实施方案,设计并制备了工作于500GHz的多层体硅圆口面波纹喇叭天线、多层体硅角锥波纹喇叭天线和多层体硅对角波纹喇叭天线。仿真结果与测试结果吻合良好,测试结果表明,在470-530GHz频段,天线具有高增益、低副瓣、方向图对称等良好特性,并且天线端口匹配特性良好。在类似研究中,处于国内领先水平。对多层体硅MEMS工艺太赫兹天线技术进行分析。介绍波纹喇叭天线理论,对波纹喇叭的分类和场分布做出了详细分析。介绍MEMS加工技术(包括体微加工、表面微加工、键合技术等),矩形波导的MEMS工艺实现流程,包括ICP刻蚀技术、内部腔体金属化和金金键合技术。结合THz功能器件的需求,给出了多层体硅MEMS工艺及实现方法,最后给出了多层体硅工艺的实现流程。基于多层体硅MEMS工艺和波纹喇叭天线理论,对太赫兹波纹喇叭进行设计。针对MEMS工艺的特点,从功能材料的角度出发,基于有限元法(FEM),在太赫兹频段,设计了圆口面波纹喇叭天线,角锥喇叭天线和对角喇叭天线。对多层太赫兹波纹喇叭进行了工艺制备,设计天线测试工装,对天线进行装配。对天线的方向图和驻波进行了测试,在中心频率500GHz,天线增益均大于20dBi,E面和H面3-dB波束宽度差小于2°,E面和H面的副瓣电平均小于-13dB,圆口面波纹喇叭天线的副瓣电平更是低于-20dB。测试结果和仿真结果吻合度高,验证了实验方案和仿真设计方法的可行性。更多还原

【Abstract】 Terahertz technology is one of the most important studies all around the world currently. Exploration of THz transmission lines and THz antennas has important practical implications on applications of terahertz technology. Design and implement of a highly integrated terahertz antenna is an inevitable trend of the development of terahertz system. Micro-electromechanical systems(MEMS) technology with high accuracy, consistency, low cost, can be used to manufacture terahertz antennas and functional devices. According to the above background, we study the design, preparation and testing of multi-layer corrugated horn antennas in terahertz band based on MEMS technology in this paper.Firstly, we discuss the terahertz antenna feeding technology based on multilayer MEMS technology. Above all, corrugated horn antenna theory is introduced, classification and field distribution of corrugated horn is analyzed in detail. Then, MEMS processing technology including body micromachining, surface micromachining, bonding technology, etc. is presented. Rectangular waveguide MEMS technology implementation process is expressed, with ICP etching technology, internal cavity metallization and Au-Au bonding included. Multilayer silicon MEMS technology and implementation method is proposed with the needs of THz functional devices. The implementation process of multilayer silicon MEMS technology is also given.In the second part, we accomplish design of terahertz corrugated horn antenna based on multilayer MEMS technology and corrugated horn antenna theory. We design circular aperture corrugated horn antennas, pyramidal horn antenna and diagonal horn antennas in the terahertz band based on the finite element method(FEM) considering the characteristics of MEMS technology. In the band 470-530 GHz, the antennas are with good characteristics of high gain, low side-lobe, symmetry radiation pattern and good matching characteristics of the antenna port.In the last part, terahertz corrugated horn multilayer process were prepared. We design the testing fixtures and assemble the antennas. The antenna pattern and VSWR are tested and the test results match well with the simulation results, verifying the feasibility of the experimental program design and simulation methods.更多还原