【作者】 张龙；

【导师】 刘刚； 高宇海；

【作者基本信息】 兰州大学 ， 计算机技术（专业学位）， 2015， 硕士

【摘要】 平面度是几何量计量中的一项重要参数,是评定许多计量器具以及机械加工产品的工作面、基准面表面质量的主要技术指标,根据平面度的不同质量要求,其评定方法和所用计量器具多种多样,其中平晶作为平面度测量的实物计量器具和主要标准器,主要用于评定高精度表面质量。为了保证平晶测量结果的准确可靠,平晶自身的平面度必须满足一定的要求,目前对于平晶平面度的测量,国内主要采用平面等厚干涉仪通过光波等厚干涉原理进行测量,该测量原理科学慎密、精度高,但是由于测量过程中采用读数显微镜对干涉条纹进行对线并通过测微鼓轮读数,其测量方法引入的误差较大,而且效率较低。为了克服上述测量方法的局限性,本课题将以严密的测量理论为指导,通过实践对该测量方法中的读数装置部分进行数字化改造,采用高分辨率的CCD摄像技术对干涉条纹进行采集,利用数字图像识别技术和计算机处理软件,通过滤波、检索、细化等方式对采集到的图像进行识别并数据处理,由此计算出平晶平面度;通过分析研究和测试试验以及测量结果不确定度的评定,验证读数装置改造后的测量方法,不仅能够有效减小测量误差,而且测量效率也将得到显著提高。本论文就平面等厚干涉仪的改造,取得了如下创新成果:(1)通过制作连接装置将CCD图像传感器一端与仪器联接,另一端通过数据线和计算机连接,编制计算机程序软件对干涉条纹进行识别和数据处理,以最小成本的改造优化原测量过程,以简单可行的操作程序克服原测量过程的弊端。(2)确定计算机程序软件中平面度判定依据,减小测量重复性误差,提高测量结果的准确性和可靠性。更多还原

【Abstract】 Flatness is an important parameter in geometrical quantity measurement。The main technical index of the surface quality of the working surface and the surface quality of the surface of the machine and the machine is evaluated.According to the different quality of flatness requirement,The methods of assessment and the variety of measuring instruments used in the measurement。The flat crystal is used as the measuring instrument and the main standard for the measurement of the flatness,is mainly used for evaluation of high precision surface quality.In order to ensure accurate and reliable of optical flat measurement results,The plane of flat crystal must meet certain requirements.Now on to crystal flatness measurement,Our country mainly adopts ways such as plane interferometer by light measure thickness interference principle.Although the measurement principle of science and rigorous, high precision, the measurement used in the process of reading microscope on the interference fringes of microdrum line and through reading,whitch is the error of the measurement is relatively large and low efficiency. In order to overcome the limitations of the measurement method, This subject will be guided by theory and make practice of the measurement method of reading device digital transformation. High resolution CCD camera is used to capture the interference fringes, using digital image identification technology and computer processing software,and recognition and processing of the collected images by filtering, searching and thinning,and calculateing the flat crystal flatness.After verification of the measurement method,the evaluation of the uncertainty of the measurement results and the test results were analyzed.Not only can effectively reduce the measurement error,and the measurement efficiency will be significantly improved.In this paper, the following innovative results have been achieved according the transformation of plane and other thick interferometer.(1)Connect the CCD image sensor with the instrument in the production connection device,and the other end is connected with a computer through a data line,the computer program software is programmed to recognize and deal with the interference fringes.To overcome thedrawbacks of the original measurement process with a simple and feasible operation procedure,at the same time, optimization of the original measurement process with minimum cost.(2)Determine the degree of Flatness Based on computer program,whitch have reduced the repeatability error and improved the accuracy and reliability of measurement results.更多还原