【作者】 武敏；

【导师】 魏燕定；

【作者基本信息】 浙江大学 ， 机械工程（专业学位）， 2015， 硕士

【摘要】 微机械或微机电系统的发展对微夹持器的性能提出更高要求,高精度的微夹持器是微纳米技术应用中的一项关键技术。微夹持器作为执行机构直接与物体接触,因此对其性能要求较高。针对目前常规微夹持器整体尺寸大、输入输出放大系数小、夹持力和夹持位移检测困难的缺点,本文设计了一种压电驱动柔性双摇杆式微夹持器并对该微夹持器的性能进行了相关分析和测试,全文分为以下几个部分：第一章给出了课题的研究背景和研究意义,综述了微夹持器本体柔顺机构、驱动方式、传感配置的发展和应用状况,接着提出微夹持器设计的目标,并对全文的工作进行了说明。第二章给出了压电驱动柔性双摇杆式微夹持器的结构,阐述了压电柔性双摇杆式微夹持器的工作机理,然后对微夹持器进行数学建模,包括推导了微夹持器放大系数,建立了微夹持器静力学和基于Lagrange方程的动力学模型,并给出了夹持位移传感配置分析以及夹持力传感配置分析,得到夹持力和夹持位移与应变值的关系式。第三章采用有限元方法对微夹持器进行静力学分析,得到微夹持器放大系数仿真值并验证了夹持端的平行夹持特点,接着对微夹持器进行模态分析,得到有限元仿真模态固有频率和振型,同时进行阶跃响应分析和频率响应分析,得到微夹持器的动态特性,最后对微夹持器夹持力和夹持位移传感配置进行仿真,验证了理论分析的正确性。第四章给出了基于虚拟仪器的压电驱动双摇杆式微夹持器测控平台,接着分别就软硬件平台进行阐述,为后续实验提供平台基础。第五章在实验平台中对微夹持器的性能进行了测试,包括夹持力和夹持位移传感器标定,输入输出位移曲线测定,扫频信号激励特性以及微夹持器夹持特性测试。第六章为总结与展望,主要总结了本文的主要工作内容,并指出今后的工作方向。更多还原

【Abstract】 It requires higher performance for microgripper since the development of micromechanical or microelectronical systems. Microgripper is an endeffector used in micromechanical or microelectronical systems.High precision microgripper is a key technique for micro/nano technology applications.The current conventional microgripper has a large size and a small amplification ratio and low accuracy, and also it’s difficult to monitor the clamping force and displacement,here in this paper, I focuss on designing a novel piezoelectric-driven microgripper with double-rocker mechanisms for micro/nano manipulation.This paper can be divided into the following chapters.In chapter 1, the background and the significance of the research are given. And also the compliant mechanisms for microgripper, the actuation styles and the sensor configuration are summarized.In chapter 2, the structure of microgripper with double-rocker mechanisms is given. Afterwards, the mathematical models including input to output displacement amplification ratio, static equations and dynamic equations based on Lagrange equation are derivated. And at the end, the clamping force and displacement sensor configurations are given.In chapter 3, the finite element method is used to analyze the static status of the microgripper and to verify the parallel clamping characteristic. And later modal test is implemented and natural frequencies and mode shapes are given. Also the step response and frequency response analysises are made to get the dynamic characteristics. The simulation of the sensor configurations shows that the theoretical derivation is right.In chapter 4, the experiment setup based on virtual instrument is given. The experiental platform includes multi-channel and multi-data cards, IPC, CCD camera, pezoeramic actuator, strain gauges and so on.In chapter 5, the performance of microgripper is tested, including clamping force and displacement sensor calibration, input to output displacement curve measurement, sweep signal excitation characteristic, and clamping characteristic.In chapter 6, a conclusion of this paper is made and the prospects and limitations of this microgripper are also indicated.更多还原