【作者】 丁磊；

【导师】 何建军；

【作者基本信息】 浙江大学 ， 光学工程， 2015， 硕士

【摘要】 随着光通信技术的快速发展,半导体激光器作为光源,在光纤通信系统和光交换系统中有着重要的地位。外腔激光器相比于普通半导体激光器,其线宽更窄,波长调谐范围更宽,有较小的啁啾,具有优良的光谱特性,所以一直是研究热点。本课题中提出了基于热调谐微环谐振腔的外腔半导体激光器,主要介绍了热调谐微环谐振腔和外腔准直光路的设计。本文中首先介绍了微环谐振腔的基本理论和传输函数,以及固体传热理论,详细分析了SO1波导的模场分布。硅材料具有较大的热光系数,能够很好地应用于热调谐,以此设计了热调谐级联双环谐振腔。本文分析了热调谐级联双环谐振腔的性能,其利用游标效应增加了波长漂移范围,增大了热调谐范围及热调谐效率。接着详细介绍了热调谐级联双环谐振腔的制作工艺流程,制作主要分为级联双环谐振腔和微加热器两个部分,详细介绍了电子束光刻、刻蚀、薄膜沉积、接触式光刻等工艺；接着介绍了端面耦合的芯片测试平台搭建和测试流程,测试了单环和双环谐振腔的输出端透射谱曲线。最后详细介绍了自聚焦透镜的特性。利用两个自聚焦透镜建立准直光路,将热调谐级联双环谐振腔和FP腔组合连接,建立外腔激光器,其可以实现窄线宽输出。更多还原

【Abstract】 With the further development of optical communication technology, semiconductor laser as the light source plays an important role in the optical fiber communication system and optical switching system. Compared to the traditional semiconductor laser, external cavity laser has the more narrow linewidth, larger tuning range, the smaller the chirp and excellent spectral characteristics. So it has been a hot research.In this thesis, I proposed an external cavity tunable laser based on thermally-tuned silicon double ring resonator. The thesis mainly introduces the thermally-tuned cascaded double rings resonator and the design of collimation optical path of external cavity.Firstly, this thesis introuduce the basic theory of the micro-ring resonator, the transfer function of the micro-ring resonator and the solid heat transfer theory. The optical field distribution in SOI waveguide is analyzed in detail. Silicon has higher thermo-optic coefficient, which can be applied to the thermally-tuned cascaded double rings resonator. The tuning performance of cascaded double rings resonator is analyzed. Owing to Vernier effect, the tuning range is enlarged, as well as increases the range of the wavelength shift and the thermal tuning efficiency.Then the thesis describes the fabrication process of thermally-tuned cascaded double rings resonator and micro-heater in detail. The test platform of cascaded double rings resonator is built; then I introduces the whole test process and the test results.Finally, the thesis introduces the details of the characteristics of the graded-index lenses. A collimation light path can be established by using two graded-index lenses. Meanwhile, thermally- tuned cascaded double ring sresonator cavity and FP cavity can be combined. External cavity laser is established, which can achieve a narrow linewidth output.更多还原