【作者】 吴海波；

【导师】 黄辉；

【作者基本信息】 大连理工大学 ， 微电子学与固体电子学， 2015， 硕士

【摘要】 基于折射率检测技术的光学微流控生物传感器,由于其具备对分析物免标记、实时快捷、高灵敏度、抗电磁干扰能力强、低探测极限等优点而得到广泛关注。目前光学微流控传感器主要包括表面等离子共振(SPR)型、回音廊模式谐振腔型、Fabry-Perot谐振腔型以及光纤光栅型等。其中只有SPR传感器实现产业化,并在生物医学研究、环境监测、医疗健康等领域获得广泛应用。Fabry-Perot腔传感器不仅可以进行体探测(例如活细胞),还能进行表面探测,是近年来的研究热点之一。本文设计并制备了高Q值的全玻璃结构的Fabry-Perot腔光学微流控生物传感器,并且设计搭建了基于光学差分探测以及锁相放大探测的低噪声测试系统。所采用的全玻璃夹层结构能够有效地消除沟道表面的刻蚀粗糙度,并相比Si衬底的传感器而言,能够将工作波长扩展到可见光以及紫外波段。制备的腔长为170μm的Fabry-Perot传感器的Q值达到875,并且结合光学差分以及锁相检测使得系统噪声低至1.2nV。研制的Fabry-Perot腔生物传感器对葡萄糖溶液的检测极限达到15 ng/mL,对应2.0×10-9折射率单位(RIU)。与现有SPR传感器10-6～10-8 RIU的检测极限相比,这是目前已知的最低的探测极限。本文还提出并设计了包含琼脂糖水凝胶的Fabry-Perot腔光学生物传感器,并初步测试了传感器对牛血清蛋白(BSA)的吸附效果,扩展了光学Fabry-Perot腔的应用范围。更多还原

【Abstract】 Optofluidic biosensors based on refractive index detection technology have received extensive attention due to its label-free detection, real-time results, high sensitivity, anti-electromagnetic interference, low detection limit, etc. Currently optofluidic biosensor mainly include Surface Plasmon Resonance (SPR) type, Whispering Gallery Mode (WGM) resonator type, Fabry-Perot resonator type, optical fiber grating type, in which only SPR achieves industrialization and have vast applications in biomedical research, environmental monitoring, health and other fields. Fabry-Perot cavity optofluidic biosensor is suitable for both volume detection (living cell) and surface detection, and it is one of the hot spots in recent years.All glass optofluidic biosensor based on Fabry-Perot cavity with high Q value was designed and fabricated, and the measurement system with low system noise based on optical differential detection and phase lock-in detection technology was also designed. The all glass sandwich structure can completely eliminate the etching roughness of the channel surface, and can extend the operating wavelength to visible and ultraviolet regions compared with that of Si-based sensor. The quality-factor of the FPC channel is 875 with the cavity length is 170μm, and the system noise can be reduced to 1.2 nV by combining optical differential detection with phase lock-in detection. A detection limit of 15ng/mL for glucose solution, which corresponds to a refractive index unit of 2.0×10-9, was experimentally demonstrated. This ultra-low detection limit is the minimum detection limit as we known, compared with conventional SPR sensors with that of 10-6～10-8 RIU.An optical Fabry-Perot cavity biosensor containing agarose hydrogel was proposed and designed, and the measurement of the adsorption effect of the bovine serum albumin (BSA) has been experimentally demonstrated, which extends the application range of the optical Fabry-Perot cavity biosensor.更多还原