【作者】 王裕；

【导师】 褚金奎；

【作者基本信息】 大连理工大学 ， 机械工程（专业学位）， 2015， 硕士

【摘要】 随着现代科技的丰富与进步,纳米技术、生物医学、半导体制造、超精密加工等技术在近年取得了飞速发展。微米级的测量技术已经很难满足现代高精密器械对精度的要求,人们需要更高分辨率、更高速度、更微型化位移测量系统。在光栅位移传感器领域,国外的技术已经达到皮米级分辨率的高水平,但是国内的相关产品的分辨率却远不及国外产品,因此设计出高精度的光栅信号细分处理技术对于我国的现代化进程和科学进步都有着重大作用。本文研究了衍射式光栅的惠更斯原理、多普勒频移理论、拍频干涉理论及偏振光学理论,并由此对使用的光路进行琼司运算推导,验证了获得的四路光强信号为振幅相等、相位依次相差90°的正弦型信号。本文设计了前级处理电路,对采集到的光强信号进行初步处理,很大程度上减小了信号的幅值不等、直流电平漂移、非正交性等不利因素对于后续信号处理细分的影响。本文研究了小波变换理论和椭圆拟合补偿理论,并结合LabVIEW和MATLAB软件进行程序设计,很大程度上去除了信号中的噪声并进一步提高其正交性,提高了后续细分所使用信号的质量。本文研究了多种常用的细分方法,并分析其优劣。并利用LabVIEW软件进行程序设计,实现了对采集信号的高分辨率细分工作。本文在最后进行了实际信号的采集,并对其进行了细分。结合采集到的信号,分析了细分方法的分辨能力。并提出改进意见,以获得更高的分辨能力。更多还原

【Abstract】 With the progress of modern society, nano-technology, bio-medicine, semiconductor manufacturing and ultra-precision machining technology are developing rapidly in recent years. However, the micron level measurement methods are no longer meeting the requirement of fabrication. It is now need some measurement devices with higher resolution, higher speed but with smaller size. In the field of grating displacement sensor, the productions of foreign companies could achieve the highest resolution of picometer leve, but the resolution of the relevant domestic products are far less than them. As a result, it is extremely important for us to develop a kind of high-resolution processing method and subdivision technology for grating signal, in order to make up the domestic black for the modernization and scientific progresses of our country.In the first part of this paper, some theories such as Huygens principle, Doppler shift, interference between different frequencies and polarization optics were introduced. Besides, the Jones calculus of the optical path was derived and then it was proved that the path could obtain four sinusoidal optical signals with equal amplitudes and the phase between adjacent signal is 90 degree.A kind of pre-processing circuit for the optical signals was designed, which was aiming to reduce the adverse influences of amplitude errors, DC level shift and non-orthogonality of the signals.Secondly, the theories of the wavelet transform and the elliptic fitting compensation were studied to developed a program with the help of Lab VIEW and MATLAB. The program was designed to refine the quality of the subsequent used signal through largely removing the signal noise and then further improving orthogonality.Also, a variety of common used subdivision methods were introduced and analyzed their advantages and disadvantages. Based on the Lab VIEW, a high resolution subdivision signal program was achieved to process the collection signals.Finally, the actual signals were collected and pre-processed with the designed circuits and then subdivided by designed programs. At the end of this paper, the resolution of the subdivision results were analyzed and some advice were gave to improve it.更多还原