【作者】 刘岩；

【导师】 张文明；

【作者基本信息】 上海交通大学 ， 机械设计及理论， 2014， 硕士

【摘要】 静电驱动是一种传统的谐振器驱动方式，其较好的稳定性和灵敏度使得其广泛应用于各类谐振器中。近年来，光梯度力作为纳谐振器的一种新型驱动方式，其优越的动力学特性，以及集光激励和光检测为一体的优点，也得到了广泛关注。本文分析了光梯度力的固有非线性特性、孔板间的静电力和压膜阻尼特性，并分别对光梯度力驱动圆环与辐条谐振系统、复合材料梁谐振器和静电力驱动矩形孔状极板式谐振器进行了动力学建模。利用多尺度法和有限元仿真方法进行分析研究，研究表明：1.光梯度力使系统呈现刚度软化效应，即随着入射光功率的增大，圆环与辐条谐振系统稳态幅值明显增大，且谐振频率随着振幅的增加而发生了较大偏移。基于立方刚度引起的系统刚度硬化现象，可以通过调节入射光功率来实现圆环辐条谐振器的频率调节。2.银和锗复合而成的两端固支梁间的光梯度力比普通材料梁间光梯度力大两个数量级，并随着银的体积填充率的增大而逐渐减小。3.在极板上穿孔会降低两极板间的压膜阻尼和静电力，分析静电力驱动孔板振动的稳态响应曲线，结果表明：随着矩形孔径的增大，压膜阻尼和静电力均减小，系统稳态幅值降低，刚度软化程度加深，品质因数增大。总之，本文的研究结论可以为光梯度力和静电力驱动微纳谐振器的动力学分析与设计提供了理论参考和依据。更多还原

【Abstract】 As a traditional driving method of resonators, Electrostatic actuationis widely used in all kinds of resonators for its good stability and highsensitivity. In recent years, Optical gradient force as a new way to driveresonators has attracted a lot of attention. The new actuation way has theadvantages of excellent dynamic character and combination of opticalactuation and optical detection. In this paper, the inherent nonlinearcharacteristics of the optical gradient force, electrostatic force and squeezefilm damping between perforated plates are analyzed. The nonlineardynamic models of the ring and spokes resonant system and nanoscale slotwaveguides of hyperbolic metamaterial driven by optical gradient forceand rectangular perforated plates driven by electrostatic force are proposed.Multiple scales method and finite element method are used and theresearch results show:1. The optical gradient force makes resonant system show a strongsoftening nonlinearity. The amplitude increases and the resonancefrequency shifts as the input optical power increases. Moreover, theamplitude and resonance frequency of the nano-resonator decreases as theinitial gap of the rings increases. Therefore, the resonance frequency canbe adjusted by changing the optical input power.2. The optical gradient force bewteen nanoscale slot waveguides ofhyperbolic metamaterials is larger than regular materials by more than twoorders and decreased when the filling ratio of silver is increased.3. Perforation will reduce the electrostatic and damping forcesbetween two parallel MEMS plates. The response of the perforated plates actuated by electrostatic force is analyzed. Result shows that when the sizeof holes is enlarged, the electrostatic and damping forces decrease; thesteady state amplitude decreases; the system is more softened and thequality factor increases.In all, this work can be useful for the further design and performanceprediction of nano-resonators driven by the optical gradient force andelectrostatic force.更多还原