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晶体生长辅助控制系统的研究

Research on Assistant Control System of Crystal Growth

【作者】 景忠杰

【导师】 李欣;

【作者基本信息】 哈尔滨理工大学 , 通信与信息系统, 2007, 硕士

【摘要】 大尺寸蓝宝石晶体在航空航天、军工和某些工业领域有着举足轻重的作用,目前世界上只有美国、俄罗斯等几个少数国家掌握此项技术。目前国内只能生长出直径110mm的蓝宝石晶体,究其原因,主要有两点:辅助控制系统精度不够;晶体生长工艺落后。本文针对第一个问题进行了深入的研究,设计出了由籽晶杆升降控制单元、籽晶杆旋转控制单元和晶体重量监测单元构成的晶体生长辅助控制系统。控制精度和检测精度得到了提高,籽晶杆的速度性能得到提高,最小升降速度由原来的1mm/h下降到0.1mm/h;位移误差由原来的±10μm降低到±5μm;籽晶杆的角位移误差由原来的±0.1o降低到±0.01o;晶体重量检测分辨力由原来的1g降低到0.1g。本系统在晶体生长工艺成熟的条件下,可以生长出直径大于200mm的蓝宝石晶体。晶体生长系统包括真空系统、功率控制系统、冷却系统、机械运动系统、晶体生长辅助控制系统五大部分。其中晶体生长辅助控制系统的水平高低至关重要,此系统的控制精度直接影响晶体的成形尺寸、晶格取向、光学指标和裂纹。本文研制的晶体生长辅助控制系统,达到了国外同类产品的水平,可以满足生长大尺寸蓝宝石晶体的需要。本文的研究成果,将促进我国材料工业领域尽快摆脱人工晶体生长水平的落后局面,提高我国依赖于大尺寸蓝宝石晶体的航空航天、军工等领域的竞争能力,为国防事业贡献一份力量。

【Abstract】 Big sapphire crystal plays a very important role in aerospace, war industry and some other industry fields. At present, only few countries, such as the USA and Russia, grasp this technology. Only small sapphire crystal, diameter 110mm, can be grown up in our country now. The main reasons are the low precision of assistant control system and the backwardness craft of crystal growing.The first problem mentioned above is studied thoroughly in this thesis, and an assistant control system of crystal growth, consists of fluctuation and rotation control units of crystal seed pole and a crystal weight monitor unit, is designed. The control and measurement precisions are improved: the speed performance is enhanced, minimum fluctuating speed of the seed pole is decreased from original 1mm/h to 0.1mm/h; displacement error is decreased from original±10μm to±5μm; angle displacement error of the seed pole is decreased from original±0.1o to±0.01o; crystal weight measuring resolution is decreased from 1g to 0.1g. Under the condition of mature crystal growth craft, the sapphire crystal, larger than diameter 200mm, can be produced by this system.Crystal growth system consists of five main parts: vacuum system, power control system, refrigeration system, mechanical movement system and assistant control system. The level of assistant control system is very important, the control precision of the system affects figuration size, crystal lattice orientation, optics characteristics and crack of the crystal. The crystal growth assistant control system developed in this thesis has reached the level of similar foreign product, and can meet the need of producing large sapphire crystal.The research result of this thesis will promote material industry field of our country to get rid of the backward aspect on artificial crystal production, enhance the aerospace and war industry domain competitive ability of our country, which relies on large sapphire crystal, and contribute a strength for the national defense enterprise.

  • 【分类号】TN304.054
  • 【下载频次】134
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