【作者】 周琼；

【导师】 谢长生； 张顺平；

【作者基本信息】 华中科技大学 ， 材料学， 2012， 硕士

【摘要】 近年来，人们的生活和工作与气体探测的关系越来越密切，在工业行业、环境监测、食品卫生以及医疗服务等各个领域中，对气体传感器的要求也是越来越高，例如装修涂漆中有毒气体的含量，公共场合易燃易爆气体的检测，以及空气质量的监测等。由于半导体气敏元件的体积小、功耗低、灵敏度高、制作方便，并且能方便地将被检测量转变为电信号，因此半导体在气敏领域的研究将有重大价值。气敏传感器的种类很多，但金属氧化物半导体（MOS）气敏传感器由于其对气体响应和恢复迅速、制备工艺成熟、结构简单、灵敏度高、成本低、易集成等优点而受到越来越广泛的研究。以金属氧化物气体传感器阵列为核心的电子鼻，与传统气体分析仪相比，具有低成本、可携带、操作方便、分析迅速等优点，已广泛应用于食品卫生、环境监控、医疗服务、航天航空等各种气味分析场合。金属氧化物气敏材料是金属氧化物传感器的基石，也是控制气敏传感器性能最重要的因素。评价金属氧化物气敏材料性能的指标包括敏感性、选择性、稳定性和响应恢复时间，它们与敏感材料的气敏响应过程密切相关。因此，准确有效地评价金属氧化物材料的气敏性能，进而筛选出性能良好的气敏材料，是研究金属氧化物传感器的关键，同时也是研发高性能、高精度电子鼻的基础。本文以建立金属氧化物气敏材料性能综合测试热激发平台为基础，测试金属氧化物材料的I-V曲线，建立适合多孔材料的导电模型，提取性能参数，研究导电机制与反应机制，为气敏材料和器件性能评价与阵列信号处理提供指导。本文开发和设计的金属氧化物气敏材料性能测试热激发平台，包括腔体结构和加热方式设计，材料芯片设计，气路组建和电路的基本实现原理。在实验中，本文对自主开发的金属氧化物热激发平台进行了各单元以及整体的性能评价。同时，以不同烧结温度下的ZnO为材料，以甲醇作为测试气氛，在工作温度为300℃条件下，分别测试了0、200ppm、300ppm、400ppm、500ppm和600ppm六个浓度点的I-V曲线，验证了平台的稳定性和导电模型的适用性。通过本文的工作，开发出一台金属氧化物气敏材料热激发平台测试系统，该系统可实现温度控制，并在不同温度下得到金属氧化物气敏材料的伏安测试曲线。通过本文的研究，可实现不同温度下金属氧化物气敏材料的基本测试，是研究金属氧化物气敏机理的基础，为后期指导材料的选择提供依据。更多还原

【Abstract】 Nowadays, gas detection has closely relationship with our life and work. And therequirement of gas sensors, using in the field of industrial production, food safety,environmental monitoring and medical, is becoming more and more. Becausesemiconductor gas sensors have advantages of small size, low power consumption, highsensitivity, the research of them using in gas sensing field would have a significant value.Moreover, metal oxide gas sensors have rapid response and recover time, sophisticatedpreparation, high sensitivity and low cost, which makes them most widely used inapplication. Based on metal oxide gas sensors, E-nose is outstanding for fast analysis, easyoperation and low cost. Furthermore, E-nose has been used in many fields such asidentification of Chinese liquors and vinegars in food quality, environment protection,public safety and aerospace applications.Metal oxide gas sensing material is the cornerstone of metal oxide sensor, which isalso the key factor to control the performance. To evaluate the performance of metal oxidegas sensing materials, including the indicators of sensitivity, selectivity, stability andresponse recovery time, are closely related to the response process. Therefore, accurateand effective evaluation of the performance is a key to study metal oxide gas sensingmaterial. Also it is the basis to develop high-performance and high-precision electronicnose.Based on the thermal excitation platform for metal oxide gas sensing material tests,IV curves were obtained. Then performance parameters were extracted. Combined withthe reaction model, response mechanism was studied to guide the evaluation and selectionof gas sensing materials. In the paper, the design and evaluation research of the thermalexcitation platform for metal oxide gas sensing materials performance test, includesarchitecture and the heating chamber design, materials chip design, and the basic circuitprinciple. In the experiment, each unit and the overall performance of the self-developedplatform were evaluated. Exactly, ZnO sintered at different temperatures were tested assample materials. Methanol was used as test atmosphere. Under the temperature of300 ℃and six concentration points, which were0,200ppm,300ppm,400ppm,500ppm and600ppm, IV curves were respectively tested to verify the stability of our platform and theapplicability of the response model.Through this work, the thermal excitation platform for metal oxide gas sensingmaterial IV curves tests was developed. It could control the temperature, and test IVcurves for metal oxide gas sensing material at different temperature. The research aims toobtain basic test for metal oxide gas sensing materials at different temperatures. Theresults would be the basis to study the response mechanism, guiding the selection of metaloxide gas sensing materials.更多还原