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太阳能丝网印刷装备硅片步进与对准系统研究

Study of Step&Alignment System for Solar Wafer Screen Printing Equipment

【作者】 周毅

【导师】 丁汉; 陈建魁;

【作者基本信息】 华中科技大学 , 机械电子工程, 2012, 硕士

【摘要】 当电力、煤炭、石油等不可再生能源频频告急,新能源革命在全球展开。太阳能作为一种新兴可再生资源,在不远的将来将成为世界能源供应的主体。太阳能电池作为太阳能应用的一个载体,已经开始应用于各领域,并不断发展普及。太阳能硅片丝网印刷装备是太阳能电池自动化生产线中重要设备之一,装备中硅片的进给和对准是影响丝网印刷的关键。本文对硅片步进和对准系统展开研究,在确定装备整体方案的基础上,分别对步进与对准系统进行方案分析与优化,实现了硅片的高速进给和高精度对准。主要内容包括如下:首先根据丝网印刷工艺要求完成步进与对准模块的方案设计,完成模块的机械结构设计,对步进系统的单驱动、双驱动方案作了分析,对视觉对准系统的串联、并联机构进行了讨论。然后结合步进系统的工作要求,完成凸轮驱动机构的分析与优化,通过运动仿真比较了偏心轮和优化凸轮的运动性能,优化后的凸轮驱动更适合设备的高速运动。根据对准系统的工作原理,设计了一种基于并联机构的平面三自由度调整机构,提出了一套实现硅片与丝网对位的计算方法,为设备的稳定实现和性能的进一步提升提供理论上的指导。最后对系统的具体动作实现与运动控制的实现作了相应分析与介绍。本文所研究的步进与对准系统,能够实现从上料、对准到下料的整个过程,对丝网印刷装备的最后实现提供了重要支撑,并且相关成果也可以应用于其它具有对准要求的设备当中。

【Abstract】 With electric power, coal and oil and other non-renewable energy getting close the edgeof extinction, a new global energy revolution is being launched in most of countries. As a newrenewable resource solar energy will make the mainly contribution in world energy supply.Solar cells, as a typical form of solar energy application, have been applied in many kinds ofarea. Solar wafer screen printing equipment is one of the most important devices in solar cellsautomated product line. The silicon wafer step system and the alignment system of theprinting equipment are the key points affecting the silicon wafer print quality.Based on the study of the silicon wafer step&alignment system, the thesis mainlycompleted the mechanical design, did program analysis and optimization on both two systemsand realized the high-speed feeding and precision alignment. The main research can beconcluded as follows:Firstly, completed the overall program and mechanical design of the wafer step&alignment system according to the process requirement, analyzed the differences betweensingle drive solution and double drive solution and had a discussion on the serial¶llelmechanism of the vision alignment system.Secondly, did program analysis and optimization on the cam drive mechanism accordingto the work requirement of step system, compared motion performances between eccentricwheel mechanism and optimized cam mechanism through motion simulation, besidesdesigned a planar3-dof parallel alignment mechanism, proposed a set of calculation for thealignment between wafer and screen which contributed to stability and performanceimproving, based on the alignment principle.At last, did analysis and presentation of the control system selection and realized thespecial movements of the agency.The step&alignment system this paper studied can achieve the whole progress fromloading, alignment to unloading which is a important support for the screen-printingequipment production. Besides the research related in the study can also be applied in otherequipment in which alignment are required.

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