【作者】 杨涛；

【导师】 陈远龙；

【作者基本信息】 合肥工业大学 ， 机械制造及其自动化， 2012， 硕士

【摘要】 电化学蚀刻技术被广泛应用在航空、航天、核能等领域，主要对难加工材料制成的零部件进行表面蚀刻加工。受中国原子能科学研究院的委托，本课题成功研制出一整套电化学蚀刻机床及工艺装备。首先，分析了电化学蚀刻加工的工艺理论，选择了合理的机床总体方案，并对机床进行数控化改造。其次，利用ANSYS有限元软件对工具阴极进行了辅助性设计，确定了工具阴极的结构并进行优化。同时，设计了一套独特的工具阴极夹具及蚀刻工作箱并对电解液系统进行设计，完成了电解液槽的设计，电解液泵及温控仪的选型。最后，对机床进行了安装调试并进行电化学蚀刻加工试验。试验结果表明该套装备能够对发射极表面实现自动化蚀刻加工，机床结构稳定，运行平稳有序，工装系统耐蚀性强、安全高效，蚀刻加工后工件表层钨单晶发生选择性腐蚀,晶面取向一致且形貌好。电化学蚀刻加工技术为由难切削材料制成的薄壁长筒类零件表面加工提供一条崭新的途径。更多还原

【Abstract】 Electrochemical etching machining is widely used to machining various kindsof hard-to-cut materials in aviation, aerospace, nuclear power and other industries.The electrochemical etching machine tool and experiment system has beensuccessfully developed in this project, based on the requirements of China Instituteof Atomic Energy.First, the technical theory of electrochemical etching has been analyzed andthe whole scheme of machine tool has been selected.Meanwhile, the machine toolhas been reformed based on numerical control system; Second, the structure ofcathode has been designed and optimized based on ANSYS. At the same time,thespecial fixture of cathode and working box have been designed.Then,the system ofelectrolytic has been designed.Furthermore, the structure of electrolytic cell hasbeen designed.The selection work of pump and temperature controller has beenfinished. Finally, the electrochemical etching machine tool and experiment systemhas been installed and tested，then the electrochemical etching experiment hasbeen carried out on the machine tool.The experiment results indicate that the surface of the emitter are processedeffectively and automatically by the electrochemical etching machinetool.Otherwise.The structure of machine tool which is running smoothly andorderly is stable. Technological equipment which provides high resistance tocorrosion can work safely and efficiently. The workpiece which is made ofingle-crystal molybdenum ubstrate has been etched selectively and the surface ofingle-crystal molybdenum ubstrate has pure topography.The technology ofelectrochemical etching supplies a new manufacture method to the cylindricalsurface of the thin-walled long tubes parts which are made of hard-to-cut materials.更多还原