【作者】 孙浩；

【导师】 唐勇； 崔庆丰；

【作者基本信息】 长春理工大学 ， 光学工程， 2012， 硕士

【摘要】 根据光的散射理论可知,当光照射粗糙表面时会发生散射现象。本文利用氩离子激光器作为光源,将其发出的光束通过激光整形系统后变成椭圆光,然后用其照射待检盘片表面。由于盘片表面疵病的作用而发生散射现象,通过分析散射光和反射光便可以得到被测盘片表面的特性。文中从散射角和散射光能量两个方面,讨论了光学设计软件ZEMAX中的四种散射模型,再结合硬盘盘片表面疵病的粗糙度等级,从中选择了一种合适的模型来反映盘片表面的散射情况,然后利用光学设计软件ZEMAX设计了该检测装置的光学系统。从而可以根据对光电倍增管和光电位置传感器接收到的光能的分析,实现对盘片表面疵病大小和位置的判断。更多还原

【Abstract】 Scattering theory indicates that light incidence on rough surface causes scattering phenomenon. The laser beam which emitted by using argon ion laser is shaped into oval light, irradiating to the surface of unmeasured disk. By analyzing the scattering and reflecti-ve lights which from the flaws of surfaces can be measured characteristics of the disk plat-ter surface.By studying scattering angle and scattering energy, this thesis discussed four kind of scattering models which were supported by Zemax. According to the roughness level of flaw surface in the hard disk, a reasonable scattering model was chosen to reflect the situ-ation of the surface. A testing optical system was designed.The size and position of flaw surfaces were found by analyzing the power which received by photo multiplier tubes and photoelectric position sensors.更多还原