光刻机精密水温控制系统的热结构设计

【作者】 曾毅；

【导师】 王皓；

【作者基本信息】 电子科技大学 ， 机械电子工程， 2012， 硕士

【摘要】 超大规模集成电路迅速发展对作为制造集成电路的关键设备——光刻机提出了更高的要求。高精度的温控装置是光刻机的关键支撑技术，以实现对投影物镜的工作环境温度进行精确控制，其研究具有重要意义。本文来源于国家02重大专项“193纳米光刻机”的子项目“光刻机物镜冷却水温控系统”，主要负责该系统的热结构设计，即研究和设计热交换子系统。本文从传热学和流体控制方程相关理论出发，吸取国内外的光刻机温控装置相关经验，结合课题需要，提出了热交换子系统的总体方案，并且对其中的重点组成部分进行了深入研究。在制冷模块的设计过程中，选取半导体制冷技术，并进行了制冷模块的结构设计，同时运用流体热力学有限元分析软件(EFD.Pro9.0)对制冷模块的冷端进行了流体热力学仿真分析计算，讨论了不同材料、不同流速的循环水、不同的半导体制冷片安装方式和不同的翅片结构参数对制冷模块制冷性能的影响，进一步优化了制冷模块的相关参数，实现了较高热交换效率和大功率制冷的要求。完成了加热水箱和循环管路系统的设计工作，在密封和防止热量损耗方面采取了一些重要措施，同时在加热水箱的设计和研究中重点考虑了混合温度不均匀循环水的能力，并在流体热力学仿真方面进行了一些分析和探索；在循环管路系统设计过程中，重点完成了三个循环回路的设计工作，并且进行了泵压、管径的选型计算以及相关辅件的选型工作。最后，完成了试验样机的调试工作，试验样机的性能和参数取得了比较满意的效果，实现了项目温控精度±0.01℃以及大功率制冷的要求。更多还原

【Abstract】 Super-large-scale integrated circuit has been swiftly developed, thus, the demandfor the key equipment of manufacturing this integrated circuit——photolithographymachine, has been much higher. And the development of this photolithography machinemust base on the high-precision temperature control device. So, the study on thehigh-precision temperature control device of the photolithography machine is verysignificant.This study roots in the “Cooling water temperature control system of thephoto-etching machine projection lens”, which is the subproject of The Major NationalProject2002“193nanometer photo-etching machine”, and mainly focus on the researchof the heat structure design of this system, which is researching and designing thesubsystem of the heat exchange. This study based on the relevant theories of the heattransfer and the fluid control equation, combined with the relevant experiences of thetemperature control device of the photolithography machine at home and abroad, andintegrated the research demand, then put forward an overall plan of this heat exchangesubsystem, in the meanwhile, emphasized on the study of the essential constituent partof this subsystem.During the process of designing the refrigeration module, the semiconductorrefrigeration technology was chosen. Combining with the fluid thermodynamics finiteelements analysis software (EFD.Pro9.0), the fluid thermodynamics simulation of thecold junction of the refrigeration module was developed and analyzed. The influences tothe refrigeration performances of the refrigeration module, such as: the materials, theflowing rate of the re-circulating water, the installation methods of the thermoelectriccooler, and the fin results parameters were discussed. Moreover, the relevant parametersof this refrigeration module in this study was optimized, thus the high efficiency of theheat exchange and the power refrigeration were actualized. After that, the design of theheating tanks and the circulating pipe network system was completed. Some majormeasures in the field of sealing and reducing the heat waste was adopted and someanalysis and exploration in the field of the fluid thermodynamics simulation was proceeded; while, in the process of designing the circulating pipe network system, threedesigning works of the circulation loop was prior completed and the model selectionand calculation of the pumping pressures, the pipe diameters and the relevantaccessories was finished.At the end of this study, the installation and the debugging of the experimentalprototype was accomplished. It turned out that the performances and the parameters ofthe experimental prototype are satisfying, which corresponded with the requirement ofthe project temperature precision control within±0.01℃and the power refrigeration.更多还原