【作者】 李建强；

【导师】 杨斌堂；

【作者基本信息】 上海交通大学 ， 机械设计及理论， 2012， 硕士

【摘要】 近代以来,各国高科技工业迅速崛起,微电子工业、光学工业等产品的生产制造经常需要在高精密定位的平台上来进行。本论文以精密三自由度磁致伸缩驱动平台为研究对象,进行了一系列仿真与实验测试。本研究采用三个超磁致伸缩驱动器(Giant Magnetostrictive Actuator,GMA)做驱动单元,激光位移传感器测量位移作为反馈信号,引入自适应控制方法对三自由度磁致伸缩驱动平台进行精密驱动控制。论文主要内容包括:第一章阐述了磁致伸缩驱动平台研究的意义和发展现状,介绍了精密驱动控制方法和超磁致伸缩驱动器的基本特性。给出全文的研究内容。第二章首先介绍了三自由度磁致伸缩驱动平台的总体结构,对其中的关键部件柔性铰链作了有限元分析。在此基础上,建立了系统的动力学模型并仿真,与测试实验结果做比较,验证了动力学模型的正确性。第三章对超磁致伸缩驱动器进行了驱动控制仿真研究。比较了PID控制与最小方差直接自校正控制的优劣,论述了引入前馈逆补偿控制器的必要性。第四章首先对三自由度磁致伸缩驱动平台进行了开环测试,为后续的闭环控制实验研究提供参考。论述了三自由度系统的耦合问题并对三自由度驱动平台进行了控制仿真研究。第五章搭建闭环控制实验验证系统,对超磁致伸缩驱动器与三自由度磁致伸缩驱动平台的驱动控制仿真结果进行实验验证。仿真与实验结果表明,采用含前馈逆补偿控制器的PID控制可以实现对三自由度驱动平台精密驱动控制的目标。第六章对全文的工作内容进行总结,并对后续研究进行展望。更多还原

【Abstract】 In last decades, high-tech industries are well developed in many countries. Manufacturing of products in many areas such microelectronics industry and optical industry often demands a delicated environment like gentle vibration or precision positioning. This thesis is a study on 3-d.o.f platform driven by giant magnetostrictive actuators. A series of simulations and experimental tests are carried out. The study using three giant magnetostrictive actuators (GMAs) as drivers, takes displacement for feedback which is measured by laser displacement sensors. In addition, adaptive algorithm is using for control of the GMA. The work could be summarized as follows:In chapter 1, the significance of the study and the development of drive platform are presented. The contents of this thesis are introduced.In chapter 2, a new kind of 3-d.o.f. drive platform is introduced, finite element analysis is taken on flexure hinges and the constitutive model of GMA is described. Eventually, the dynamic model of the system is established. According to the model, a simulation system based on SIMULINK is carried out. The simulation results verify the model and may serve for the active control analysis of the platform system.In chapter 3, study on active control of a single GMA is carried on. The difference of PID control and minimum variance control is clarified. The significance of introducting inverse compensation controller is discussed.In chapter 4, some basic characteristics of 3-d.o.f drive platform are tested. On the basis of chapter 3, control method is extended to 3-d.o.f drive platform. Coupling and control stability problem are discussed.In chapter 5, experimental system of the GMA and 3-d.o.f drive platform is established for experimental verification.In chapter 6, main work of the thesis is summarized, and the further researches are dicussed, finally.更多还原