【作者】 任翔；

【导师】 胡乾午；

【作者基本信息】 华中科技大学 ， 光电信息工程， 2009， 硕士

【摘要】 本文采用激光微熔覆和微笔直写工艺,将加热电阻、测温电阻、测量电极和敏感膜集成在一起,快速制备了膜片型气敏传感器。传感器采用双面结构设计,基片选用5mm×5mm×0.6mm的96%氧化铝陶瓷。SnO2气敏浆料采用在乙醇中分散再浓缩的方法配制。传感器制作过程如下:首先采用激光微熔覆在基片正面制作叉指电极;接着用微笔直写工艺在基片背面直写电热电阻和电极,经激光处理,清洗后就可获得加热器;然后用微笔直写工艺在基片正面电极层上制备气敏膜,最后采用TO-6管封装就可制得微气敏传感器。设计并搭建的气敏测试系统由测试箱、注气装置、供电装置和数据采集装置组成。实验表明,激光功率的大小对SnO2气敏膜的微观结构和气敏性能有重要的影响。激光微熔覆制备的气敏膜在工作温度250℃下对2000ppm酒精蒸汽的响应度最大,为8.6,其响应时间和恢复时间分别为7s和20s;而传统烧结的气敏膜响应度为7.4,响应时间和恢复时间分别为10s和25s。由此可见,激光微熔覆和微笔直写工艺开辟了一种快速、无掩模的柔性直写厚膜气敏传感器新途径。更多还原

【Abstract】 A membrane-type gas sensor, which integrated with a heater, a temperature detector, the electrodes and the sensitive film, was directly fabricated by means of micropen direct writing and laser micro-cladding.Using double-sided structural design,The substrate of the sensor was 96%-Al2O3 in size of 5mm×5mm×0.6mm; The SnO2 paste was fabricated by using the methods of dispersing-concentrating process with the ethanol. Comb-shaped Au electrodes were manufactured on the front side of the substrate by using laser micro-cladding after coated with gold paste by spin-coating. Using the methods of micropen direct writing, the SnO2 sensor membrane was directly writing upon the electrodes, square waveform heating structure was produced on the back side of the substrate, and a packaged gas-sensing sensor in a TO-6 tube was obtained. A testing system, which consisted of the test box, gas injection devices, power supplying devices, test and data acquisition system, for testing the properties of gas-sensing was designed and constructedThe result showed that the different laser processing power has a significant impact on the gas-sensing properties. In the testing condition of 2000ppm ethanol vapor and the temperature of the heater being 250℃, it was found that the gas sensor which fabricated by the hybrid technique of micropen and laser micro-cladding presented the maximum response value of 8.6, and the response time and recovery time was 7s and 20s, respectively. Comparing with the above, the maximum response value of the gas sensor obtained by furnace was 7.4, and the response time and recovery time was 10s and 25s, respectively. In conclusion, the result demonstrated that the SnO2 gas sensor fabricated by the hybrid technique of micropen and laser micro-cladding exhibited excellent gas-sensing properties a little better than that of the traditional sensors. Therefore, laser micro-cladding and micropen direct writing opened up a new rapid method for flexibly direct writing thick film gas sensor.更多还原