【作者】 刘波；

【导师】 王俊杰；

【作者基本信息】 武汉理工大学 ， 机械电子工程， 2010， 硕士

【摘要】 光纤布拉格光栅(FBG)压力传感器作为新兴的压力传感器正在如火如荼的发展。随着光纤传感器应用的扩大,对高灵敏度光纤压力传感器的需求日趋明显。光纤传感器可以工作高温、腐蚀性、强电磁场及易燃易爆的危险恶劣环境中。这些特性让光纤传感器在市场中的应用不断扩大。作为光纤传感器中不可或缺的一元,光纤布拉格光栅压力传感器也不断完善。光纤布拉格光栅压力传感器信号采用波长调制,与其他光纤传感器相比,更不易受外界参量的影响,具有精确度高、稳定好、易于分布式监测、易于解调等特点。为此,最近几年光纤布拉格光栅压力传感器的饱受瞩目。新的高灵敏度光纤布拉格光栅传感器研究一直不断推陈出新。本课题通过对国内外主流的光纤布拉格光栅压力传感器进行了总结,分析了各种传感器的优缺点。在此基础上设计了薄壁圆筒结构的光纤光栅压力传感器、偏心受力平面膜片的光纤光栅压力传感器和无偏心受力平面膜片的光纤光栅压力传感器三种不同的结构。三种结构测量的压力不断减小,同时精度不断增加。三种结构都考虑了温度的影响,通过结构的被动温度补偿和温度的二次修正,将温度的影响降到最低。通过一系列传感器的结构改进,将偏心传力结构改为中心传力结构使得该传感器的回程误差大为减小。实验数据表明,薄壁圆筒结构的光纤光栅压力传感器的最佳灵敏度达0.0319nm／MPa,偏心受力平面膜片压力传感器灵敏度达0.2166nm／Mpa,无偏心受力压力传感器达86.9nm／MPa,其中无偏心受力结构的平面膜片压力传感器为2009年国内所有光纤光栅类型压力传感器中最高灵敏度。本文涉及机械、材料、信息等多学科知识,主要做了以下工作：1.阐述了光纤布拉格光栅的工作原理,分析了光纤布拉格光栅的应变、温度、压力传感特性；2.分析了国内现有的基于光纤布拉格光栅的压力传感器技术,比较各个传感器的原理,优缺点和实验数据；3.设计了薄壁圆筒结构的光纤光栅压力传感器,结构的被动温度补偿和温度的主动实时修正实现了温度的二次去敏。实验数据表明该结构适用于高温高压环境,为高精度压力传感器温度去敏设计、密封设计等提供参考依据；4.设计了偏心受力的平面圆形膜片光纤光栅压力传感器,实验数据表明基于圆形膜片结构的压力传感器灵敏度高于薄壁圆筒结构的传感器,且加工工艺简单；5.设计了无偏心受力的平面圆形膜片光纤光栅压力传感器,实验数据表明该结构灵敏度达86nm／Mpa(0.869pm／mm水柱),该灵敏度在国内同类型压力传感器中达到领先水平。同时也证明了圆形膜片偏心受力对传感器灵敏度的影响；6.通过理论和实验两方面综合分析了三种结构传感器实验数据误差的原因,并提出了更高精度压力传感器的改进意见。更多还原

【Abstract】 As a new sensor, pressure sensor based on fiber Bragg grating(FBG) is developed rapidly. Following the widely use of optical fiber sensors, it becomes more necessary to develop high sensitive pressure sensor based on fiber. Optical fiber sensors can work in high temperature, causticity, strong magnetic field, inflammable and explosive environmental extremes. As an obligate part of fiber sensor, pressure sensor based on FBG is being perfected. Pressure sensors based on FBG are adopted by wavelength, more insensitive to external parameter compared with other fiber sensors. Therefore they are high precision, more stable, and as well as distributed meter. Therefore, research on FBG sensors are hot these years. New high sensitive sensors based on FBG are always getting rid of the stale and bring forth the fresh.This thesis summarizes main pressure sensors based on FBG, analyses their merit and demerit. Then optical fiber Bragg grating pressure sensor based on thin-walled cylinder structure with temperature compensation, fiber Bragg grating pressure sensor based on eccentric diaphram and fiber Bragg grating pressure sensor based on non-eccentric diaphram are described in this thesis. The pressure metered by these three different sensors diminishes gradually but precision increases. Passive temperature-compensation package and active correction for the residual temperature drift are mutually adopted to eliminate the thermal induced errors. By a series of improvement, eccentric diaphram changed into non-eccentric diaphram, the errors are diminished effectively. Research shows that the response of optical fiber Bragg grating pressure sensor based on thin-walled cylinder structure with temperature compensation is 0.0319nm/MPa, the response of fiber Bragg grating pressure sensor based on eccentric diaphram is 0.2166nm/MPa, the response of fiber Bragg grating pressure sensor based on non-eccentric diaphram is 86.9nm/MPa which is the best response in the same style internal sensors.This thesis refers to several subjects such as mechanism, material,and information. Main jobs completed are as follows:1. Expound the working principle of FBG and theory of the fiber Bragg grating coupling model, analyze the sensing properties of FBG in strain, tempetature and pressure.2. Analyze the domestic technology on optical fiber Bragg grating sensors, compare their working principles, merits and experimental data.3. Devise an optical fiber Bragg grating pressure sensor based on thin-walled cylinder structure with temperature compensation. Passive temperature-compensation package and active correction for the residual temperature drift are mutually adopted to eliminate the thermal induced errors. The research shows that this sensor can work in high temperature condition.4. Devise an fiber Bragg grating pressure sensor based on eccentric diaphram which is more sensitive than the thin-walled cylinder structure.5. Devise an fiber Bragg grating pressure sensor based on non-eccentric diaphram. The research shows that the response is 86nm/Mpa and comes the top of the same style internal sensors.6. Synthesize the experimental data and give some advise to the following improvement on high sensitive sensors.更多还原