【作者】 张立；

【导师】 林玉池； 赵美蓉；

【作者基本信息】 天津大学 ， 测试计量技术及仪器， 2009， 硕士

【摘要】 微位移驱动技术是当今世界各国研究的热点问题,是纳米测量及加工技术中的关键技术之一,随着科学技术的发展,需要高精度、高分辨力、能够灵活控制的微位移驱动及检测系统,用以直接进行有关工作或配合其它仪器设备完成高精度的研究和应用,正是这些需要,极大地促进了微位移驱动定位技术的发展。角位移驱动定位技术的需求也越来越广泛,在许多领域迫切需要大行程高分辨力的角位移驱动定位系统,以实现高精度的定位。课题对角位移驱动定位及检测技术进行了探索,通过研究角位移驱动定位及检测技术的发展现状,在总结前人经验的基础上,提出了一种集成了高精度角位移检测装置圆光栅的回转式压电微角度执行器系统,同时研究检测其角位移的角度检测系统和驱动其工作的控制系统。圆光栅回转式压电微角度执行器的结构创新地在压电执行器上集成了角位移传感器,采用圆光栅与微驱动机构一体化的方案,同时结合运用了尺蠖运动原理和柔性铰链机构进行设计,压电执行器的运动原理、柔性铰链设计、圆光栅集成结构设计以及总体机械结构设计得到了详细论述;圆光栅检测信号的处理是根据圆光栅信号的正交特性,采用硬件方面大数计数和小数软件细分的方法进行辨向细分等处理,实现由单片机检测计算出角位移值,把检测结果引入控制环节,圆光栅传感器、检测电路及单片机系统组成了角位移检测系统;控制系统方面采用单片机产生四路驱动信号,并运用直流放大式原理设计压电陶瓷驱动电源,放大控制信号驱动压电执行器。压电陶瓷驱动器电源的作用原理、分类以及设计特点得到了介绍,压电陶瓷驱动电源的设计要求、方法、电路等方面的内容得到了充分论述。实验结果表明:圆光栅回转式压电微角度执行器的运动的最小步距达到纳米级,行程为全圆周,系统实现了高精度定位。更多还原

【Abstract】 Micro-controlling and positioning technology is hot issues in the present world,and it is one of the key technologies in nanotechnology measurement and processingtechnologies.With the development of science and technology,the micro-displacementcontrolling and detecting system which is high precision, high-resolution and flexiblecontrolled is needed, so that can be used directly with the work or other equipment tocomplete the research and application of high precision, it is these needs, contributesignificantly to the development of the micro-displacement driving and positioningtechnology. The demand of micro angular displacement driving and positioningtechnology is becoming more and more wide, many areas need high-resolution bigtrip micro angular displacement controlling and positioning system urgently, in orderto achieve high-precision positioning.Research of the paper is the exploration of the micro angular displacementdriving and positioning technology, through researching the development status of theangular displacement driving and positioning technology, at the conclusion of thebasis of previous experience, an angle rotary piezoelectric micro-actuator systemwhich is integrated with high-precision angular displacement detection device circulargrating is brought up, at the same time its angular displacement detection system anddrive system are researched.The structure of circular grating rotary piezoelectric micro-angle actuatorinnovatively integrated with angular sensors, taking the use of integrated circulargrating with the micro-drive body, combined with the use of the principle ofinchworm movement and flexure hinge design. Piezoelectric actuator movementprinciple, the integration of the circular grating, overall design of the mechanicalstructure has been focused on in the paper. Circular grating detection signalprocessing is based on the characteristics of orthogonal signal, uses the methods oflarge numbers counting in hardware and small numbers subdivision in software, anddetection by the single-chip to calculate the value of angular displacement,detectionresult is drawn into controlling section,circular grating sensor, detection circuit andsingle-chip system compose the detection system. Control systems uses single-chip togenerate four-way drive signal, and apply the DC amplification style to design PZTpower, which amply control signal to drive piezoelectric actuator. The theory,classification and design features of piezoelectric ceramic driving power areintroduced, the design requirements, methods and other aspects of the circuit havebeen fully discussed.The experimental results show that: The movement of circular grating rotarypiezoelectric micro-angle actuator is linear, the smallest step achieves nano-scale,itinerary is the whole circumference.更多还原