【作者】 王宇航；

【导师】 刘俭；

【作者基本信息】 哈尔滨工业大学 ， 仪器科学与技术， 2010， 硕士

【摘要】 随着微电子、微机械、微光学等技术的发展,对宏微复合结构样品的三维非接触精密测量技术的需求日益迫切,因此本文对具有光学层析能力与高横向分辨力特性的共焦扫描检测技术中存在的问题开展研究,重点分析了共焦扫描检测系统中扫描机构、数据采集模块和数据处理算法所涉及的关键技术问题。本课题“共焦检测系统扫描采集与数据处理技术研究”主要包含以下研究内容:(1)针对宏微复合结构样品几何特征参数测量的要求,搭建了共焦扫描检测系统中的三维扫描机构,利用具有微米级位移分辨力的步进电机与具有纳米级位移分辨力的压电陶瓷实现宏微结合三维扫描;通过对步进电机与压电陶瓷坐标系不重合的影响的分析,进行坐标系调校,并对测量结果的坐标数据进行补偿。(2)通过对光敏二极管、雪崩光电二极管、光电倍增管的特性分析,并结合对现有共焦扫描检测系统的扫描速度、信号强弱等特性的研究,设计了光电转换模块,并进行了典型参数测量实验,实现了数据采集功能。(3)基于LabVIEW编写了共焦扫描检测系统配套软件,实现了对压电陶瓷与步进电机的上位机控制、同步触发数据采集处理和测量结果的三维显示等功能。(4)针对共焦检测轴向响应特性曲线存在伪峰干扰的问题,采用伪峰剔除滤波算法,并利用二维相关运算实现了多子区域的拼接。实验表明,对周期3μm高度500nm的标准光栅测量数据进行滤波处理后,测量误差分别为0.07μm和17nm ;对微加速计样品实现了9子区域有效拼接测量,测量区域达到220μm×220μm,并可进一步扩展拼接范围。更多还原

【Abstract】 With the development of microelectronics, micromechanics and micro-optics technologies, it is in urgent need of the three dimensional and non-invasive precision measurements of macro and micro composite structure specimens. Therefore, this paper studied the capability of optical tomography and high lateral resolution confocal scanning detection technology, especially analyzed the critical technical problems of the scanning mechanism, data acquisition and data processing algorithms in the confocal scanning detection system.The subject“study on the scanning collection and data processing technique of confocal detection system”mainly includes the following work:(1) In view of the geometric characteristic parameters of macro and micro composite structure specimens, a three dimensional scanning structure has been established in the confocal scanning detection system, which used the stepper motor with micrometer resolution and PZT with nanometer resolution to achieve this function. Further, the non-overlapping effect between the three-dimensional coordinates of stepper motor and PZT, has been analyzed primarily and corresponding adjustment and calibration have been designed.(2) Considering the performance analysis of photodiodes, avalanche photodiode and photomultiplier tube, combined with the characteristics of scanning speed and signal strength in the existing confocal scanning system, the photoelectric conversion module was designed and experiments were conducted to measure the typical parameters, finally the data collection function was realized.(3) A completed software for confocal measurement has been programmed based on LabVIEW, which realizes the computer control of PZT and stepper motor, simultaneously triggered data acquisition and the three dimensional display of measurement results, etc.(4) According to the characteristics of confocal detection system, the false peaks removed filter algorithm was designed, using the two-dimensional correlation operation to achieve sub-regional splicing. A standard grating with 3μm in cycle and 500nm in height was measured and the data filtering was conducted, finally, the measurement error was 0.07μm and 17nm, respectively. The 9 sub-region splicing measurement for micro-accelerometer was carried out and the measurement area was 220μm×220μm, which could further expand the splicing scope.更多还原