【作者】 王永刚；

【导师】 宋开臣；

【作者基本信息】 浙江大学 ， 机械电子工程， 2009， 硕士

【摘要】 本论文研究了平面线圈式挠性加速度传感器的原理和设计方法。在提高挠性加速度传感器质量摆片的敏感性和抗冲击能力,进一步增强磁场,增加测量范围等方面进行了研究。首先采用聚酰亚胺(PI)材料良好的综合机械性能制作了敏感质量摆片的挠性支承梁,并利用多层热叠压工艺制作了敏感质量摆片,有效地提高了敏感质量摆片的抗冲击能力,并且简化了制作工艺,降低了加工难度。其次研究了磁极力矩器的原理,建立了磁极力矩器磁场分布数学模型。利用多层无缝联结工艺制作了密绕多层螺旋线圈,产生可以调节强度大小的磁场,达到了提高磁场稳定性和变换量程的目的。使用液体超顺磁材料来增强磁场,解决了传感器的磁屏蔽,零磁滞,纳米材料的团聚、氧化问题。本文共分六章三个部分。第一部分在阅读了大量文献的基础上,介绍了常见的加速度计的类型,研究了石英挠性加速度计的工作原理,国内外研究现状以及当前存在的问题。第二部分分别研究了敏感质量摆片和磁极力矩器,针对敏感质量摆片,研究了挠性支承的弯曲变形、应力分布,指导设计了挠性支承的结构参数,并且运用有限元计算方法对敏感质量摆片进行了受力分析;针对磁极力矩器,推导了磁场分布公式;对比分析和验证了MATLAB的计算结果和的ANSYS仿真结果。第三部分根据上述原理与技术设计了一种聚酰亚胺挠性加速度传感器,包括工作原理、电路原理、结构设计及系统装配,针对敏感质量摆片、磁极力矩器和磁路结构分别设计实验进行了验证,最后对原理性样机进行了综合测试。更多还原

【Abstract】 The paper studies the principles and the design methods of the flexible acceleration sensor based on plane helix to enhance the sensitivity and the ability to impact of the accelerometers sensitive quality film,to enhance the magnetic field and to increase the measure range.First,the flexible support of the sensitive quality film is made of polyimide because of it s characteristics,and the sensitive quality film is made in the technology of making FPC to enhance the ability to impact of the film,to simplify the production process and to reduce the difficulty of processing.Second researches on the principle of the magnetic moment,builds the mathematical model of the magnetic field of the magnetic moment.Use FPC technology to make the spiral coil to produce the magnetic field that can be adjusted,that can enhance the stability of the magnetic field and change the measure range of the accelerometer.Solving the problems of shield the magnetic sensor,zero-hysteresis,the reunion of nano-materials and oxidation,use the liquid super-paramagnetic materials to enhance the magnetic field.The thesis is composed of six chapters in three parts.The first part introduces the common type of accelerometers,studies the quartz accelerometers flexible working principle,domestic and foreign research and the existing problems,after reading a large number of documents.The second analyzes the sensitive quality film and the magnetic moment.About the sensitive quality film,study bending deformation and stress distribution of the flexible support to guide the design of structure and make a stress analysis in the method of the finite element.For the magnetic moment,deduce the distribution formula of the magnetic field and compare to the results of MATLAB and the ANSYS simulation results to guide the design of the structure.The third according to the above-mentioned principles and the technical design a flexible polyimide acceleration sensors,including the structural,the working principle,the principle of circuit and the assembly systems,and design the experiments to prove the structure of the sensitive quality film,the magnetic moment.Final the prototype of the accelerometer has a comprehensive test.更多还原