【作者】 李慧；

【导师】 姜德生； 文泓桥；

【作者基本信息】 武汉理工大学 ， 光电子及信息材料， 2009， 硕士

【摘要】 具有消逝场结构的光纤氢气传感器是一款工艺要求非常高,灵敏度高,稳定性强,可以进行复用的新颖的光学氢气传感器。对它的研究是一个多学科高度交叉的研究领域。其中涉及了氢敏感膜的研究及其生长工艺、光在光波导的传输模式分析、光学表面等离子共振技术、氢气传感器的检测技术等。如何实现各种相关技术的整体集成、降低渐逝场型光纤氢传感器的制造成本、提高氢敏传感器的可靠性、重复性和灵敏度等是目前具有消逝场结构的光纤氢气传感技术走向产业化所面临的主要问题。本论文针对具有消逝场结构的光纤氢气传感器存在的问题,开展了以下一些相关的技术性研究:钯的氢敏感原理、表面等离子共振原理、腐蚀型光纤的制作、薄膜的生长、传感头的封装和传感系统的实验及结果分析。本论文的具体工作如下:1、研究了光纤氧气传感器的分类及每种传感器的原理,设计了具有消逝场结构的光纤氢气传感器。2、研究了本系统相关的各种理论,包括光学表面等离子共振技术、渐逝场传感技术及光在光波导的传输模式分析等,并通过数值模拟分析了系统的最佳参数。3、对传感器腐蚀时所需要的各种相关工具进行了制作,对腐蚀液进行了配置,并设计出了一套合理的腐蚀流程,并通过实验揭示了光纤腐蚀的规律性。4、设计了一套可靠的氢气浓度测试系统,通过系统,对传感器的响应时间、功率逆向等各项性能进行了测试、分析和研究。本文重点介绍丁工作原理和制作工艺。并对腐蚀时间是50分钟、镀膜厚度为50nm的光纤传感器进行了实际测试,得出了氢气浓度从0%增大到100%然后再减小到0%的光功率变化关系图。更多还原

【Abstract】 The fiber-optic evanescent-field hydrogen gas sensor is of complex technics and high sensitive. It requires an interdisciplinary study. A hydrogen sensor using evanescent field fiber comprises the study of the thin film for the hydrogen sensing and the deposition technique, a surface plasmon resonance, the field distribution around the optical fiber, measurement approach and the data processing etc. To put this technique into industry,it attracts more attention on the following questions:how to integrate different technologies relative together,how to cut the cost of the sensor system and how to improve the performance of the sensor.This paper focus on the problem of the fiber-optic evanescent-field hydrogen gas sensor.The research work mainly includes the hydrogen sensing principle of Pd film,the principle of surface plasmon resonance,fabrication of the tapered fiber and etched fiber,the deposition of Pd film, the encapsulation of sensor and the experimental results(including the design of the set-up)and the discussions.Main jobs completed are as follow:1. Had researched the classification of fiber-optic hydrogen sensors and the principle of each sensor.Had designed the fiber-optic evanescent-field hydrogen gas sensor.2. Had researched various theories related to the sensor, including a surface plasmon resonance, evanescent field sensing technology and the field distribution around the optical fiber, and got the optimal parameters of the system through numerical simulation analysis of.3. Had produced a variety of related tools when eroding of the sensors need,and configurated the eroding solution ,and designed a reasonable process of erode, and the experimental data disclose the rule of fiber eroding.4. Had designed a reliable system to measure the hydrogen concentration. Through the system, we analysis and research the sensor performance testing,such as: response time, power reverse etc. This paper focuses on the working principle and the production process.Tested the fiber-optic evanescent-field hydrogen gas sensor which erodeing time is 50 minutes and the thickness of the Pd film is 50nm, and got the optical powe changes relationship figure when concentration of hydrogen increased from 0% to 100% and then reduced to 0%.更多还原