【作者】 刘海涛；

【导师】 井文才；

【作者基本信息】 天津大学 ， 光学工程， 2008， 硕士

【摘要】 本文对微表面形貌检测仪进行了系统建模和功能扩展的探究。对系统的整体结构、光学系统和软件部分功能作了详尽的介绍。理论上对光学系统进行了光能计算,选择LightTools软件对光学系统完成了建模,通过软件与理论推导出的照度情况进行了对比。为测量非球面被测物,实现了双波长测量法功能,分析了该算法及其误差补偿算法的原理。为增加测量深度及粗糙度可测范围,实现了白光干涉法,分析其原理。为增加白光零级条纹的可见度,引入组合光源法。对光纤连接器及粗糙度样板进行了探测试验,给出不同光源组合的实验对比。分析了算法误差来源及改进方法。论文完成的主要工作1.阐述了微表面形貌检测仪的整体结构和光学系统。设计并制作了LED的驱动电路板,为后续组合光源实验创造了条件。给出了为提供更准确的前置电压和前置电流而调节电路板的过程。介绍了微表面形貌检测仪软件部分的功能、结构组成及可测参数。2.为在今后的工作中进一步改善系统照明,对光学系统建立了软件模型。首先从理论上对光学系统光能损失进行了估计、对系统光能进行计算。然后用LightTools对整个光学系统进行了仿真模拟并进行了光路追迹。最后分析了CCD光敏面上的照度情况,与理论推导结果进行了对比。3.为了使微表面形貌检测仪能够测量曲率较大的非球面被测物,在系统中引入了双波长测量法,分析了其原理及误差放大原因,给出消除误差的算法原理。为了增加微表面形貌检测仪的测量深度,引入了白光相关峰探测五步法和三步法,分析了其原理。用Visual C++实现了以上算法。为了增加白光干涉中零级条纹的可见度,引入了组合光源法,给出理论上的最佳波长组合。4.用双波长测量法测量光纤连接器端面。分别采用不同波长组合进行实验。通过单波长实验对双波长测量法进行了对比,给出基于本系统的误差来源及改善方法。采用白光干涉法测量粗糙度为0.8μm的粗糙度样板。用白光LED照明做了白光相关峰探测五步和三步法实验,选择三步法进行后续形貌提取。用组合光源照明进行功能实验。对比实验验证了组合光源照明探测效果好于白光LED照明效果。给出了测量粗糙度样板的测量精度。更多还原

【Abstract】 This thesis develops the fundamental modeling and functional extend of the nanometer phase-shifting interferometer for micro-surface profile measurement. Fully introduced the whole structure, optical system and software. Theoretically gave the luminous energy analysis. Built the model of optical system using LightTools, push out the luminous simulation and compared the result with the theoretical analysis. In order to extend the measurement range, the two-wavelength measurement(TWM) was introduced, gave the analysis of it and its error compensation method. The white-light interferometry was introduced. Synthetic sources measurement was realized. The software for the measurements was developed. Through experiments on roughness samples and fiber connector, the comparison of different source synthesis was given, the measurement precision for these methods were calibrated.Major work of this dissertation:1. The whole structure and lumination system was introduced. The newly designed drive circuit was made for further synthetic sources measurement. The process of circuit adjustment was given. The function, structure of the software and parameters can be measured was illustrated.2. In order to improve the illumination condition, the optical system was built using LightTools. Theoretically gave the luminous energy analysis. Comparison and analysis was made between the two results.3. TWM was realized for the interferometer to measure aspheric optical element in the future. The reason and elimination algorithm of its error was analyzed and realized. In order to extend the depth of measurement, the white-light five-step and three-step method was realized. Synthetic sources measurement was used for accurate detection of zero-order fringe.4. Fiber-end was measured by TWM. Experiments were taken by different light sources synthesis, and the results were compared with that taken by single source method. Its error source and the compensation method were proposed. Roughness sample plate with Ra=0.8 was detected by Synthetic sources measurement. After the experiment with white-light LED using five and three-step method, the three-step method was decided to be used in future measurement. The conclusion was made after a comparison experiments: The result taken by synthetic sources measurement is better than white-light method.更多还原