等离子显示器屏板全自动精密定位系统的研究

【作者】 王海春；

【导师】 张金龙；

【作者基本信息】 南京师范大学 ， 电工理论与新技术， 2008， 硕士

【摘要】 精密定位技术是荫罩式等离子显示器(SM-PDP)生产过程中的关键性基础性技术,是保证PDP良好成像效果的前提。本文主要研究利用激光莫尔信号实现高精度位置检测与精密定位的理论、方法及其关键技术,并将相应成果应用到工业现场控制中。应用物理光学和傅立叶光学理论,分析了双级光栅衍射时的相对位移与激光莫尔信号强度的关系,建立了基于激光莫尔信号的精密位移测量数学模型。应用数值分析方法对建立的数学模型进行了计算机仿真。探讨了精密定位的基本理论依据,研究了精密定位的基本控制规则。在精密定位研究的基础上,研制开发了荫罩式等离子显示器(SM-PDP)精密定位工作台,精密定位台以工业控制计算机为核心,采用CCD和激光莫尔传感器检测位置偏差,驱动系统采用脉冲细分式驱动步进电机,并通过精密丝杠机构将细分后步进电机的微小角度转化为微米级的线性位移,以满足定位控制的需要,最终的定位误差依靠计算机闭环控制作用来消除。在研制的SMPDP精密定位工作台上,进行了精密平面定位技术的研究。通过对平面位置与对应莫尔信号关系的优化分析,找出了x-y-θ三自由度的平面最佳控制策略,并由计算机系统实现自动调节和控制,完成x-y-θ三自由度的全自动精密平面定位,最终实现前基板、荫罩与后基板三者之间的全自动精密平面定位,定位精度为±5μm。更多还原

【Abstract】 The technology of precision positioning plays a pivotal role in the production of the Shadow- Mask Plasma Display Panel (SM-PDP), and makes it possible that the SM-PDP can display good images. This dissertation focuses on the fundamental theory and key technology of precision position detection and precision positioning based on laser Moirésignals. The advances in precise detection and position have all been enabled by applying the technology to industrial control.The relationship between displacement of double diffracting gratings and the intensity of Moirésignal is studied by applying theories of physics optics and Fourier optics, a mathematical model of linear displacement measure based on the Moirésignal is established, and computer-simulated pattern changes are obtained. The fundamental theory of precise positioning and basic rule of precise positioning were explored. The research results were applied to develop SM-PDP precision positioning device. The computer controlled alignment device can achieve high-accuracy position detection and precise positioning using CCD and laser-Moire sensors. The mechanical drive system of the precision platform is composed of stepping-motor in micro step mode and precise screw drive set, which can translate small rotational movement into sub-micron level linear movement. The final alignment error is mainly eliminated through computer controlled closed loop so as to alienate the precision requirements of the mechanical drive system. On the SM-PDP precision positioning device, the precise plane positioning technique was studied. The best control strategy of precise plane positioning is developed by analyzing the relationship between plane positions and corresponding Moire signals. On this control strategy, the alignment device could realize x-y-θthree-freedom full automatic precision plane positioning so that it could achieve automatic precision positioning of front substratum, shadow mask and behind sub stratum, the fine alignment accuracy could be±5μm.更多还原