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真空电弧沉积掺Zn二氧化钛薄膜光催化及耐磨性研究
Research on Photocatalysis and Wear Resistant Properties of Zn-doped Titanium Film Prepared by Vacuum Arc Deposition
【作者】 黄雪梅;
【导师】 曾鹏;
【作者基本信息】 广东工业大学 , 材料加工工程, 2008, 硕士
【摘要】 二氧化钛具有优异的光催化活性,它能将环境中存在的微量有机物降解为无污染的无机物,还能杀死细菌病毒。但是,二氧化钛光催化剂须依赖于紫外光,对太阳光的利用率低,因而限制了它的应用。为了提高二氧化钛在可见光区的光催化活性,充分利用太阳光,必须对其进行改性。而且,作为一种薄膜,摩擦或机械性能对其可靠性和功能性具有重要的影响。因此,对其摩擦学特性及摩擦磨损特性进行研究不仅具有重要的理论意义,也具有广泛的应用前景。本文采用真空电弧沉积法在玻璃基片上沉积了掺杂Zn的二氧化钛薄膜,借助于X射线衍射(XRD)、原子力显微镜、光电子能谱、紫外-可见分光光度计、分光光度计等分析方法,研究了二氧化钛薄膜的制备工艺(氧分压、薄膜厚度、Zr沉积时间、沉积速率、离子束辅助束流、退火温度)对二氧化钛薄膜结构、光学性能、表面形貌、光催化性能的影响,采用微型摩擦磨损试验仪来探讨掺杂Zn的二氧化钛耐磨性能。实验表明:沉积的二氧化钛薄膜均为非晶态,经退火处理后全部为锐钛矿相,呈A(101)衍射晶面择优取向,且在600℃范围内,随退火温度的升高,结晶得到改善。掺杂Zn薄膜基本上都是由粒径约为100nm颗粒组成,颗粒形状为球形和椭球形,且在薄膜上弥散分布着钛滴。薄膜在波长范围300nm~850nm内都有一定的吸收边,且在小于350nm的紫外区有强烈吸收,在可见光范围内具有较好的透过性。掺杂Zn的二氧化钛薄膜具有较好的紫外光催化性能,具有一定的可见光光催化性能,氧分压为1.0Pa、Ti沉积时间为10min、Zr沉积时间为2min、弧流为70A、退火温度为500℃、有离子束辅助沉积的薄膜光催化性能最好,且降解染料品红的反应符合一级反应动力学方程,通过摩擦学性能测试,掺杂Zn薄膜较之于纯二氧化钛具有更好的耐磨性。
【Abstract】 Titanium dioxide has wide application because of its excellent photo catalytic activity. It can be used to degrade the organic Compounds to inorganic matters which have no pollution, and to kill bacteria and virus in the environment. However, its applications has been limited because the titanium dioxide only can show the excellent photo catalytic activity under the UV light. Sunlight can not be fully used. In order to improve the photo catalytic activity and make full use of the sunlight, the titanium dioxide must be modificated. Moreover, as a film, friction or mechanical properties have important influence to their reliability and functionality. Therefore, research on the tribological properties and friction and wear characteristics has important theoretical meanings, and wild application prospect.In this test, the Zn-doped titanium dioxide films are prepared by vacuum arc deposition on glass substrate. By using X-ray diffraction (XRD), atomic force microscope, X-Ray Photoelectron Spectroscopy, UV-Vis spectrophotometer, spectrophotometer, And other analytical methods, to study the preparing technology (partial pressure of oxygen, film thickness, deposition time of Zr, deposition rate, ion-beam assisted beam and annealing temperature) of titanium dioxide films, and the influence to the structure, optical properties, surface morphology, and photocatalytic properties. And the wear resistance of Zn-doped tianium dioxide film has been studied by using of WTM-2E micro-friction and wear-testing.The result shows that: titanium dioxide films deposited are amorphous, after annealing all films are anatase, assumed A (101) orientation. And along with the annealing temperature rises in the range of 600℃, the crystal has improved. The films are basically composted by spherical and elliptical shape particles and the size is 100nm. The surface of the film have a number of titanium drips growth. All the films have absorption edge in the wavelength range of 300.00nm~850.00nm, and have a strong UV absorption in the area less than 350nm. And in the visible light range has good transmission. The film has good UV photocatalytic properties, has some visible photocatalytic properties. The best photocatalytic properties of the main parameters are: partial pressure of oxygen: 1 .0Pa; Ti deposition time: 20min; Zr deposition time: 2 min; the deposition rate: 70 A; annealing temperature of 500℃and have ion-beam assisted deposition. The degradation of fuchsine reaction accord with the first-order kinetics equation. The tribology performance test shows that the Zn-doped film has better wear resistance than the pure titanium dioxide.
【Key words】 titanium films; Zn-doped; vacuum arc deposition; photocatalysis; Wear resistance;
- 【网络出版投稿人】 广东工业大学 【网络出版年期】2008年 09期
- 【分类号】TB383.2
- 【被引频次】2
- 【下载频次】124