【作者】 陈刚；

【导师】 曾亦可；

【作者基本信息】 华中科技大学 ， 微电子学与固体电子学， 2006， 硕士

【摘要】 铁电材料具有一系列重要的特性,例如铁电性、压电性、热释电效应、电光效应、声光效应、光折变效应和其他非线性光学效应等,在微电子和光电子等技术领域显示出十分重要的现实应用和潜在应用的前景。近年来,随着铁电材料制备工艺,特别是铁电薄膜的制备工艺和技术的不断成熟、完善和发展,铁电材料及其器件的应用领域不断地扩大,国内外越来越多的研究者对铁电材料及其器件感兴趣,他们不但研究现有铁电材料的性能及其改良途径而且不断地探索、发掘新的铁电材料。因此,研究者们对铁电材料及器件的有关参数进行快速、自动和精确地测量提出了更高的要求。为此目的,需要研究铁电材料参数计算机测试系统。该测试系统可以对铁电陶瓷材料、铁电薄膜材料进行I-V特性和电滞回线的测量,并将所得到的测试结果(包括图形和数据)从数字示波器传输至计算机进行处理(包括保存、调用和修改数据等)。与传统示波器显示、测量铁电材料参数特性相比,该系统可以将I-V曲线、电滞回线和数据进行保存、调用和修改,这样可以更加方便地对不同的铁电材料进行比较研究,具有很强的实用性。本论文主要对该铁电材料参数计算机测试系统测试模块中的直流功率驱动部分和I-V特性测试软件进行了深入研究。由于测量铁电陶瓷的I-V特性必须在铁电陶瓷的两电极上施以高电压,同时因为铁电陶瓷的极化转向时间比铁电薄膜慢得多,若用较高频率的信号去测,那么在快速变化的电场作用下,极化有可能不能跟踪电场,为兼顾铁电薄膜的测量,需要研制一直流功率放大器,其频率范围应满足0.01Hz～100kHz。I-V特性测试软件不仅可以对铁电材料I-V曲线中重要参数进行计算,而且也可以对铁电样品的漏电导及线性感应电容进行补偿,得到接近本征I-V曲线。更多还原

【Abstract】 Ferroelectric materials have many important properties, such as ferroelectric property, piezoelectric property, pyroelectric effect, electrooptic effect, acoustooptic effect, photorefractive effect, and some other nonlinear optics effects. Ferroelectric materials have very important practical and potential application in microelectonic and optoelectronic fields.In recent years, the preparation technology of ferroelectric materials, especially ferroelectric films, has been continually developed, and the application field of ferroelectric materials and devices has become larger and larger. More and more researchers are interested in ferroelectric materials and devices. They not only study the characteristics and improvement of the existing ferroelectric materials, but also explore and discover new ferroelectric materials. Therefore, researchers expect faster, more automatic, and more accurate measurement of the parameters of the ferroelectric materials and devices. It is necessary to study a computer-aided system for measuring ferroelectric material parameters.This system can measure both the I-V characteristics and the hysterisis loops of the ferroelectric ceramics and films. The measurement results including the figures and data can be transferred from the digital oscilloscope to the computer and then they can be processed ( such as saved, opened, and modified ). In contrast with the traditional oscilloscope which can also show and measure the parameters of ferroelectric materials, this system can save, open and modify the I-V curves, hysterisis loops, and data. It’s more convenient and practical for the researchers to study different ferroelectric materials.Both the DC power amplifier in the measuring module, and the software for measuring I-V characteristics in the computer-aided system for measuring ferroelectric material parameters are mainly discussed in this thesis. High voltage should be applied to the two electrodes of ferroelectric ceramics for measuring its I-V characteristic. The polarization switching of ferroelectric ceramics is much slower than ferroelectric films. If the frequency of the measuring signal is very high, the polarization of ferroelectric ceramics cannot follow the fast-varying electric field. Therefore, in order to measure the I-V characteristic of both ferroelectric ceramics and films, we have to use a DC power amplifier whose frequency ranges from 0.01 to 100kHz.Using the software for measuring I-V characteristics, we can not only calculate the ferroelectric sample parameters, but also compensate leak conductance and linear capacitance of the ferroelectric sample in order to show intrinsic I-V curve.更多还原