SCB点火技术中等离子体的电子密度的测量

【作者】 冯红艳；

【导师】 李燕； 王俊德； 朱顺官；

【作者基本信息】 南京理工大学 ， 物理化学， 2007， 硕士

【摘要】 本论文对半导体桥（SCB）点火技术中等离子体的电子密度，进行了深入系统的研究，采用三个不同的测试方法，分别测量了SCB等离子体的电子密度，并讨论了测试环境对测定结果的影响。具体研究如下：（1）利用Acton Spectrapro．2750型双光栅光谱仪，在局部热力学平衡条件下，用AlⅠ394.40nm谱线Stark展宽法，测量了SCB等离子体的电子密度，电子密度的变化范围为4.32×10¹⁶cm^-3—0.89×10¹⁶cm^-3，并得到了电子密度随时间的变化规律；（2）利用Saha方程法理论，根据在SCB等离子体发射光谱研究中发现的谱线SiⅠ390.55nm和SiⅡ413.09nm，设计并完成了Saha方程法测量系统。系统的时间分辨率达到0.1μs，解决了国内现有的多通道光学分析仪（OMA）测量SCB等离子体的电子密度时，时间分辨率不够的问题；（3）利用Saha方程法测量系统，在不同的能量输入下，对两种不同的SCB（陶瓷塞和塑料塞）产生的等离子体的电子密度，进行了测试和讨论。该系统测量的电子密度与AlⅠ394.40nm谱线Stark展宽法的结果在同一数量级上，均为10¹⁵cm^-3—10¹⁶cm^-3，并且变化规律相同，实现了两种测量方法的相互验证；（4）在不同能量输入下，利用压力传感器（CY-YD-205）测量了陶瓷塞SCB在一定体积密闭容器内产生的压力；推导了适合SCB等离子体的压力方程，并建立了压力和电子密度的关系，得到最大电子密度的数量级为10¹⁸cm^-3，比AlⅠ394.40nm谱线Stark展宽法和Saha方程法测量结果大二到三个数量级。更多还原

【Abstract】 The SCB plasma electron density was studied in this paper. Based on different theories, three independent systems were established and used to measure the electron density.（1） Under the supposition of local thermodynamic equilibrium （LTE）, using Stark broadening of AlⅠ394.40nm to calculate the SCB plasma electron density. The results indicated that the electron density changed from 4.32×10¹⁶cm³ to 0.89×10¹⁶cm³ in the period of 10μs to 70μs. The dependence of electron density on the time delay was obtained.（2） Because the two lines of SiⅠ390.55nm and SiⅡ413.09nm were discovered in the SCB plasma emission spectrum, based on the Saha equation, the double channel measurement system was designed and set up. The temporal resolution of the system was 0.1μs, which was superior to the domestic existing OMA.（3） The SCB plasma electron density was measured by the double channel measurement system. Two different SCB, which chip was mounted on Ceramic or plastic, were used. The electron density was discussed under the different energy input. The SCB plasma electron density was 10¹⁵cm^-3—10¹⁶cm³ in identical magnitude, comparing with result computed from Stark broadening of AlⅠ394.40nm. And the rule of the time evolution of electron density was same. The relative comparison and mutually confirms were realized between the two methods.（4） With a pressure transmitter （CY-YD-205）, the SCB plasma pressure was measured, which produced in an airtight volume container. A suited state equation for the SCB plasma was established, the relation between plasma pressure and the electron density was also inferred. The maximum magnitude of electron density was 10¹⁸cm^-3.更多还原