【作者】 张冬梅；

【导师】 何赛灵；

【作者基本信息】 浙江大学 ， 光学工程， 2007， 硕士

【摘要】 光子晶体作为一种新型人工电磁介质的出现，将为光子学及信息产业的发展开创新的领域。光子晶体巨大的应用前景令世界很多著名实验室在近十年来掀起了光子晶体制作的研究热潮，已经成为光学领域一个非常重要的研究方向。本文主要研究利用激光全息法结合光聚合制备不同周期的二维正三角形光子晶体模板，结合软光刻工艺实现对光子晶体结构的反。激光全息法的特点是利用多束激光相互干涉产生的空间全息图案，图案中的光强极大值点就形成晶格点阵，通过光与物质的相互作用，曝光显影之后就可以在合适的感光材料上记录全息图样，从而形成周期有序微结构模板。本论文的工作概括为以下几点：1．概述激光全息结合光聚合微制作技术的研究进展以及软刻蚀工艺的研究进展，介绍光源的特点，光聚合材料及弹性材料PDMS的特点及工作原理。2．根据全息理论分析模拟出制作特定结构和特定周期的光栅和二维光子晶体模板所需的干涉强度分布，计算出相干光束的光学参数，特别分析了偏振特性及光强阈值对于干涉图案的影响，优化选择偏振特性及光强阈值设计出结构均匀，对比度好的干涉图案——正三角晶格点阵。3．设计完成制作二维光子晶体模板的光学系统的搭建。4．利用激光全息法依次制作不同周期的光栅和二维正三角形光子晶体模板，记录处理实验数据，根据实验结果分析影响光子晶体模板质量的因素。5．利用PDMS实施软光刻工艺，以制备好的光栅及光子晶体模板为主模，将周期性结构反转到PDMS上，对PDMS进行适当的处理压印光刻胶可以得到更小周期的光子晶体模板。6．改变全息光刻的干涉图案，在SU8胶上制备出孔状的光子晶体模板。本文最后对完成的工作进行了总结，并对该课题的研究工作进行了展望。更多还原

【Abstract】 As a new-style artificial material, photonic crystals will facilitate the development and innovation of the photonics and information industry. The tremendous application foreground of photonic crystals upsurges the research in fabricating periodic artificial structures in many famous labs all over the world during the last decade, which has been a very important research direction in the field of photonics.The main research is the fabrication of two dimensional (2D) holographic crystal templates with different periods by holographic lithography. The character of holographic lithography is to use N laser beams to form interference patterns, the max. of intensity distributed periodically, forming crystal lattice, which is used to be recorded in the photosensitized material, so that photonic crystal template is formed.The following are the main assignments finished.No.1: This paper reviews the recent development of the study on the micro-fabrication technique by holographic lithography combined with photo-polymerization and the development of soft lithography. The characters of the laser sources, photosensitized polymers and PDMS are introduced in the paper.No.2: According to the holographic theory, we calculate some important optical parameters to form grating and 2D triangular lattice textures, especially analyze the polarization and intensity threshold, which affect the interference patterns. We simulate the optimized patterns by choosing the polarization and intensity threshold.No.3: Design and complete the optical system to create 2D holographic crystal templates. No.4: Use holographic lithography to create grating and 2D holographic crystal templates, record and process the data. Analyze the factors which affect the quality of the holographic crystal templates. No.5 Reverse the periodic structure in PDMS by soft lithography .By processing properly the PDMS, we can reduce the period of the structures sequentially.No.6 Change the hologram, and fabricate 2D holed photonic crystal templates in Epon-SU8. Finally, I conclude the paper and prospect the future of this field.更多还原