基于PSD的微距测量系统研究

【作者】 林眉德；

【导师】 林斌；

【作者基本信息】 浙江大学 ， 测试计量技术及仪器， 2007， 硕士

【摘要】 随着激光技术、精密机械技术、电子技术和计算机技术的突飞猛进，激光微距测量逐渐向高速度、高精度、多功能、多参数、小尺寸的方向发展，它将在机器视觉、自动加工、工业在线检测、产品质量控制、实物仿形、生物医学等领域具有重要的意义和广阔的应用前景，将对提高生产效率、以及现代化生产水平起到巨大的作用。本文设计的系统应用于测量枪筒内振动面的位移。本文首先介绍了国内外当前对激光微距测量的发展状况，比较了各种测距方法的优缺点，确定激光三角法测距作为本文系统设计的基础。然后详细地论述了PSD微距测量系统的总体设计过程。PSD作为一种光电效应器件，由于其高速度、高分辨率、信号处理简单等优点，使用非常广泛，本文选用了一维梳状PSD作为系统的探测器，并介绍了PSD的工作原理，在此基础上利用Multisim对一维梳状PSD的线性度及引起PSD探测误差进行了分析。本文给出了光学系统的总体设计，在传统光学三角法测量系统上作了改进，光源方面使用半导体激光器与光纤耦合的方式，使系统更趋于小型化，系统直径20mm。并且利用数学模型，导出了线性度，分辨率与系统参数之间的关系。本文还分析了检测信号处理电路系统，采用单片机模式代替传统的用运放构成的位置计算电路，提高了测试的可重复性，并实现系统的自动测试。最后对测量系统进行了标定，并对不同材质平面进行了测试，给出了各个平面的测试曲线，系统己基本满足课题的要求。更多还原

【Abstract】 With laser technology, precision machinery technology, electronics and computer technology’s advancement, Laser measurement Microshot gradually develops to high speed and precise multi-function, multi-parameter, and small size. It will have great significance and broad application prospects in machine vision, automated processing, industrial online testing, quality control, physical profile. biomedical fields,which will improve production efficiency and play a tremendous role in modernization of production level. In this paper,the system is designed for measuring displacement of vibration cartridge surface.This paper firstly introduces the current measurement of laser micro-state of development, and compares methods ranging’s advantages and disadvantages, Laser triangulation measurement is selected as this paper’s base of system design.Then we discussed the design process of PSD Microshot measurement system in detail.As a photovoltaic device, because of its high speed, high resolution, simple signal processing,PSD is used very widely. In this paper we use a one-dimensional comb PSD as a detector of system,and introduces the principle of PSD. On this basis, We use Multisim to analyse the linearity of comb-type PSD and the cause of error detection of PSD.In this paper,we present the design of the optical system,and improve the traditional optical triangulation measurement system,semiconductor lasers and fiber coupling method is used in light Source,which makes the system tend to be more miniaturization,the diameter of system is 20mm,in the end we use mathematical model to create the relationship between linearity, resolution and system parameters.The paper also analyzes the signal processing circuit system. MCU mode is choosed instead of using the traditional form with the operational amplifier calculation location circuit,which improves the repeatability of test and realizes automatic test of system.Finally, the system was calibrated and tests plane of different materials and gives all the testing planar curves,so the System has basically met the requirements of the project.更多还原