【作者】 林明贤；

【导师】 韩高荣； 赵高凌；

【作者基本信息】 浙江大学 ， 材料科学与工程， 2007， 硕士

【摘要】 本论文对阳光控制镀膜玻璃、低辐射镀膜玻璃以及自清洁镀膜玻璃进行了全面的综述。基于实现上述几类功能复合的目的，采用适用于在线镀膜的常压化学气相沉积法（APCVD）制备低辐射/阳光控制复合功能薄膜和自清洁/低辐射复合功能薄膜，并利用X射线衍射（XRD）、透射电镜（TEM）、场发射扫描电镜（FE-SEM）、X射线色散能谱仪（EDS）、原子力显微镜（AFM）、紫外-可见光吸收光谱（UV-VIS）等测试手段对其制备条件和结构、光学、电学性能以及自清洁性能之间的关系进行了研究。利用单丁基三氯化锡（MBTC）为先驱体，以三氟乙醇（TFEA）为新的F掺杂剂，水（H₂O）作为反应催化剂，采用APCVD法在Si/SiC镀膜玻璃上沉积SnO₂：F薄膜，制备SnO₂：F/（Si/SiC）复合功能薄膜。通过改变MBTC、TFEA和H₂O的浓度，发现SnO₂：F/（Si/SiC）复合薄膜的结构形貌及性能发生了显著变化。SnO₂：F薄膜的择优取向主要取决于先驱体和催化剂的浓度，但与掺杂剂的浓度无关。复合薄膜的可见光-近红外区反射率与单层SnO₂：F薄膜相比有显著提高，具有一定的隔热性能。当先驱体浓度为1.8mol％，掺杂剂浓度为35wt％，催化剂浓度为1mol％时，复合薄膜的方块电阻达到最低值21Ω/□，其中、远红外的平均反射率达到81％，具有良好的低辐射性能。因此，SnO₂：F/（Si/SiC）复合薄膜在一定程度上实现了阳光控制与低辐射功能的复合。此外，对复合薄膜的断面EDS线扫描分析发现，Sn、C、Si等离子在膜层间相互扩散，而且Na等碱金属离子扩散到低辐射功能层中，这在一定程度上降低了复合薄膜的低辐射性能另外，以四异丙醇钛为先驱体，采用APCVD法，在SnO₂：F镀膜玻璃上沉积TiO₂薄膜，制备TiO₂/SnO₂：F复合功能薄膜。通过改变基板温度、基板传输速度等工艺参数，发现随着基板温度的升高，TiO₂/SnO₂：F复合薄膜的表面粗糙度不断增大，TiO₂从非晶态转变为锐钛矿。在480℃时，复合薄膜表面出现针状结构，光催化和亲水性能提高。基板温度继续升高，锐钛矿开始转变为金红石，针状结构消失，光催化和亲水性能继续提高，当温度达到580℃时，基本为金红石相，光催化和亲水性能降低。随着基板传输速度的增大，TiO₂膜厚减小，光催化和亲水性能降低。利用同样方法对TiO₂/SnO₂：F复合薄膜的界面进行分析，发现Sn离子扩散到了整个TiO₂膜层中，而Ti离子只扩散到SnO₂：F的表层。复合薄膜的可见光透过率在60～90％之间，基本满足建筑物的采光需要。当基板温度为430℃，板速为1.5m/min，复合薄膜在保持良好的低辐射性能的基础上具备了一定的光催化性和亲水性。更多还原

【Abstract】 A comprehensive introduction of solar control （Sun-E） coating glass, low emission （Low-E） glass and self-cleaning coating glass has been given in this paper. Aimed at compositing the function mentioned above, Low-E/Sun-E and self-cleaning/Low-E multifunctional films were prepared by the method of atmospheric pressure chemical vapor deposition （AP-CVD）, which is applicable to deposit films on-line. And the relations between the preparation conditions and the structure, morphology and properties of the composite films were analyzed by the methods such as X-ray diffraction （XRD）, transmission electron microscope （TEM）, field emission scanning electron microscope （FESEM）, energy dispersive spectroscopy （EDS）, atomic force microscope （AFM） and ultraviolet & visible absorption spetrum （UV-VIS）. Using monobutyltin trichloride （MBTC） as the precursor, trifluoroethanol （TFEA） as a new dopant, and water （H₂O） as a catalyzer, the SnO₂:F/（Si/SiC） composite films were prepared by depositing fluorin doped tin dioxide on the Si/SiC coating glass substrates, with the method of atmospheric pressure chemical vapor deposition （APCVD）. The structure, morphology and properties of SnO₂:F/（Si/SiC） composite films varied with concentration of MBTC, TFEA and H₂O observably. It was observed that the preferred orientation of SnO₂:F thin films mainly depended on the concentration of precursor and catalyzer, but not that of dopant. Visible and near infrared reflectivity of the composite films were observably higher than that of the single SnO₂:F thin film, and the composite films had the function of heat insulation. At the concentration of MBTC=1.8mol%, TFEA=35wt%, and H₂O=1mol%, the square resistance of composite film had the minimum value 21Ω/□ , and the mid-far infrared average reflectance reached 81%, that is, the film had a good Low-e function. So the multiplicity of the functions of Low-E and Sun-E could be realized to some extent. In addition, analysing the cross section of SnO₂:F/（Si/SiC） composite film by EDS line-scanning, it was found that there existed an inter-diffusion between the multi-films of ions such as Sn, Si and C, and alkali metals ions such as Na may diffuse into Low-E functional layer, which can reduce the Low-E function. Meanwhile, using titanium （IV） isopropoxide as the precursor, TiO₂/SnO_:F composite films were prepared by depositing titanium films on SnO₂:F coating glass substrates, with the method of APCVD. It was found that the surface roughness of TiO₂/SnO₂:F composite films increased and TiO₂ transformed from amorphism into anatase as the temperature increased. Needle structure was observed in the composite film at 480℃, and the photocatalytic efficiency and hydrophilisy increased at the meanwhile. When temperature went on increasing, TiO₂ began to transform from anatase to rutile, and the needle structure disappeared, but the photocatalytic efficiency and hydrophilisy still increased. When the temperature achieved to 580℃, TiO₂ became rutile in large part, which led to the decrease of the photocatalytic efficiency and hydrophilisy. The thickness of TiO₂ thin film decreased as the transporting velocity of substrate increased. It resulted in the decrease of the photocatalytic efficiency and hydrophilisy. The interface of TiO₂/SnO₂:F composite film was analyzed by the same methods mentioned above. It was found that Sn ions diffused deep into TiO₂ layer, but Ti ions only diffused to the surface of SnO₂:F layer. The optical transmittance in the visible region of the composite films varied in the range of 60-90%, which was suitable for the daylighting request of buildings. When the substrate temperature was 430℃, and the substrate velocity was 1.5m/min, the composite film maintained some photocatalysis and hydrophilisy besides nicer Low-E function.更多还原