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规模化DBD等离子体源中的介电效应与光谱诊断

The Dielectric Effect in Scaled DBD and Optical Emission Spectroscopy Diagnosis of DBD

【作者】 刘程

【导师】 张芝涛;

【作者基本信息】 大连海事大学 , 环境科学, 2007, 硕士

【摘要】 大气压介质阻挡放电(Dielectric Barrier Discharge,DBD)非平衡等离子体作为一种绿色技术在环境领域的应用方兴未艾,目前中小型大气压DBD等离子体源已经在有机废气治理等方面取得了一定成果。但是在船舶压载水处理等需要大规模等离子体的场合,现有的等离子体源还无法满足其要求。阻碍规模化DBD等离子体源发展的主要问题有:理论基础薄弱、电介质材料性能低、系统难以匹配、效率低下等。为了发展规模化高效等离子体源,本文结合国家自然基金项目“气体电离放电治理外来微生物入侵性传播研究(60371035)”,对规模化DBD等离子体源电介质材料进行了研究,并应用发射光谱诊断DBD中的电子激发温度。 根据DBD等效电路分析电介质层在DBD中的镇流作用机理,结合电介质镇流作用讨论了DBD中微流光的形成过程。研究发现电介质层是DBD中产生和维持微流光放电的关键,电介质的介电效应对DBD放电性能的影响至关重要。 基于高纯度α-Al2O3和以SiO2为主要成分的特种搪玻璃材料的实验研究表明:Al2O3的介电性能优良,在经历温度从23℃到200℃的变化过程中,介电常数变化量仅为0.19。AFM、XPS、AES测试显示,老化实验后Al2O3内部的主要元素含量未发生明显变化,表明它可以经受住强电场和高活性等离子体的长期作用,具有作为规模化DBD电介质材料的潜质,但目前加工成本很高,构形困难。采用低温长烧工艺将特种玻璃材料烧结在钢管内壁制作成DBD放电管。实验表明搪玻璃的介电常数均值为5.4,在自身温度经历骤变时,介电性能变化量甚微。搪玻璃的介电性能虽然不及Al2O3,但它易于加工,和电极结合紧密,价格低廉,可以用于规模化DBD电介质层的制备。 应用USB2000紫外可见发射光谱仪对Al2O3和搪玻璃DBD进行诊断。在放电媒质为氩气,流量为0.1m3/h,放电电压1kV时,二者的电子激发温度分别为0.33eV和0.29eV,电子激发温度的诊断为构建大规模DBD放电源提供了参考。

【Abstract】 The no-thermal plasma generated by dielectric barrier discharge (DBD) is one of the green technologies, which are applied to treatments of air and water. Existing plasma resources can’t be used in treatment of ship’s ballast water because of their limited scale and efficiency, but developing a scaled DBD plasma resource is held back by factors such as power supply, dielectric performance and so forth. The paper is supported by China National Natural Science Foundation (60371035) entitled ’The study of treating invasive spread of alien organism by gas discharge’.The paper focuses on the research of dielectric for scaled DBD plasma resource. In order to evaluate the potential of Al2O3 and enamel being used in scaled DBD, tests of dielectric performance of the materials are carried out, and the results are presented as following:The dielectric constant of Al2O3 is stable while being heated to 200℃. The AFM, XPS, AES tests show that the elements of the Al2O3 layer does not experience obvious change after being aged for 1000 hours, which suggests that the material is able to undergo long time operation of DBD plasma. Enamel is prepared by special processing in the lab, the test results illustrate that the dielectric performance of enamel is not as excellent as Al2O3, But the advantage of low cost makes the material competitive for scaled DBD.The optical emission spectroscopy is used to diagnose the electron excitation temperature of DBD with Al2O3 and enamel as dielectric, respectively. When the flow rate of Ar is 0.1m3/h, the electron excitation temperature is 0.33eV and 0.29eV, respectively. The determination of electron excitation temperature paves the way for establishing theory of scaled DBD plasma resource.

【关键词】 规模化DBD介电效应电介质材料镇流作用
【Key words】 ScaledDBDDielectric effectDielectricCurrent limitation
  • 【分类号】X701
  • 【被引频次】1
  • 【下载频次】249
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