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半导体自动测试系统的故障诊断

Fault Diagnose of Automatic Test System of Semiconductor

【作者】 张妍

【导师】 金杰;

【作者基本信息】 天津大学 , 电磁场与微波技术, 2006, 硕士

【摘要】 半导体测试是芯片生产中的重要环节,芯片出厂前都要经过100%的测试,以保证芯片的质量。半导体自动测试系统是测试生产中的重要仪器,芯片的测试都是由这些昂贵的仪器自动完成,保证它们的利用效率对于生产厂商控制成本是非常重要的。半导体自动测试系统出现故障需要优秀的维修工程师进行故障诊断和维修,维修工程师的工作效率会影响到半导体自动测试系统的利用效率。为增强他们对GPIB通信接口的诊断能力,我们开发了GPIB通信接口的联合调试系统。GPIB联合调试系统主要功能是将接口通信的内部信息提供给维修工程师,将不容易观察到的接口底层信息反馈出来,并可以模拟测试系统和测试机进行模拟测试通信。我们研究的联合调试系统包括三大模块:接口模块、模拟测试模块、模拟测试机模块。接口模块用于测试GPIB接口的底层通信,检测测试机与主机之间是否可以建立通信连接,并可以提示故障。模拟测试模块可以模拟一种测试系统与几种不同的测试机进行模拟测试,通过模拟测试通信环境来检测测试机的GPIB接口在测试中是否出现问题。模拟测试机模块,可以模拟几种测试机与一种测试系统进行模拟测试,同样通过模拟测试通信环境来检测测试系统的GPIB接口。故障诊断的智能化是现在故障诊断的主流发展方向,基于知识的智能故障诊断主要采用专家系统的方法实现。CLIPS是一种实现专家系统的编程语言,它支持基于规则的、面向对象和面向过程的编程。我们针对一种半导体测试中的测试机,使用专家系统的方法开发了帮助工程师诊断决策的智能诊断专家系统,将维修工程师的决策经验使用CLIPS语言实现。智能诊断专家系统主要实现对测试机开机问题的诊断决策,其中包括有电源问题,控制回路问题,主计算机问题和程序下载问题。

【Abstract】 Semiconductor Test is the vital step of the chip production, a hundred percent of chips need to be tested to make sure the quality of all chips. ATS(Automatic Test System)of Semiconductor is the important equipment of the test production, chips are automatically tested by them. They are very dear equipments, so make sure the high rate of utility of them is very vital to the factory.The fault of the ATS is diagnosed by the engineer, the work efficiency of the engineer affect the rate of utility of ATS. They always are the mechanical and electric expert, so for the sake of enhancement the diagnostic ability of interface, I developed the Troubleshooting System of GPIB interface. Troubleshooting System of GPIB interface could show the intern information of interface to the engineer, and could simulate the tester or the handler.The Troubleshooting system contains three modules: interface module; simulate test module; simulate handler module. Interface module could test the interface communication and show the possible fault. Simulate test module could simulate a sort of tester which could communicate with several sort of handler. Simulate handler module could simulate several sort of handler which could communicate with a sort of tester.The intellectualized fault diagnose is the main research direction, The intellectualized fault diagnose based on knowledge is always developed by the expert system. CLIPS are a kind of expert system’s programme language, it could programme of based on rules, object oriented, process oriented.I developed a diagnostic programmer to help engineer to diagnose a kind of handler. This need communicating with the engineer and make their experiment to the CLIPS. The main function is diagnosing the starting problem of the handler, come down to power problem, control circuit problem, main computer problem and programme download problem.

  • 【网络出版投稿人】 天津大学
  • 【网络出版年期】2007年 01期
  • 【分类号】TN307
  • 【被引频次】1
  • 【下载频次】189
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